Richard R. Freeman
Managing Director/Co-Founder at Zeeko Ltd
SPIE Involvement:
Author
Publications (23)

Proceedings Article | 20 November 2017 Open Access Paper
L. Proserpio, S. Campana, O. Citterio, M. Civitani, H. Combrinck, P. Conconi, V. Cotroneo, R. Freeman, E. Mattini, P. Langstrof, R. Morton, G. Motta, O. Oberle, G. Pareschi, G. Parodi, C. Pels, C. Schenk, R. Stock, G. Tagliaferri
Proceedings Volume 10565, 105652N (2017) https://doi.org/10.1117/12.2309176

Proceedings Article | 9 September 2013 Paper
Proceedings Volume 8880, 888018 (2013) https://doi.org/10.1117/12.2026198
KEYWORDS: Polishing, Photomasks, Extreme ultraviolet, Chemical mechanical planarization, Surface roughness, Surface finishing, Extreme ultraviolet lithography, Head, Polishing equipment, Excimers

Proceedings Article | 7 September 2013 Paper
Proceedings Volume 8838, 88380P (2013) https://doi.org/10.1117/12.2023919
KEYWORDS: Polishing, Surface finishing, Particles, Abrasives, Computational fluid dynamics, Fluid dynamics, X-ray optics, 3D modeling, Process modeling, Aspheric lenses

Proceedings Article | 15 October 2012 Paper
Proceedings Volume 8502, 85020F (2012) https://doi.org/10.1117/12.929632
KEYWORDS: Polishing, Surface finishing, X-rays, Diamond turning, Diamond, Hard x-rays, Nickel, Space telescopes, X-ray telescopes, EUV optics

Proceedings Article | 27 September 2012 Paper
M. Civitani, O. Citterio, S. Campana, P. Conconi, E. Mattaini, G. Pareschi, G. Tagliaferri, G. Parodi, V. Burwitz, G. Hartner, J. Arnold, S. Schuler, H. Combrinck, R. Freeman, R. Morton, P. Simpson, D. Walker
Proceedings Volume 8443, 84430Q (2012) https://doi.org/10.1117/12.925906
KEYWORDS: X-rays, Calibration, X-ray telescopes, Polishing, Glasses, Atomic force microscopy, Sensors, Silica, Mirrors, Metrology

Showing 5 of 23 publications
Conference Committee Involvement (2)
Optical Manufacturing and Testing XII
20 August 2018 | San Diego, California, United States
Optical Manufacturing and Testing XI
9 August 2015 | San Diego, California, United States
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