Robert Muller
at Broadcom Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 24 May 2004 Paper
Mark Simmons, John Jensen, Robert Muller, Andrew Jost
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533194
KEYWORDS: Metrology, Reticles, Time metrology, Algorithm development, Photomasks, Binary data, Precision measurement, Distance measurement, Standards development, Logic

Proceedings Article | 17 December 2003 Paper
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518159
KEYWORDS: Reticles, Semiconducting wafers, Critical dimension metrology, Metrology, Photomasks, Tolerancing, Time metrology, Logic, Cadmium sulfide, Semiconductors

Proceedings Article | 27 December 2002 Paper
Robert Muller, Glen Scheid, Neal Callan
Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467850
KEYWORDS: Reticles, Inspection, Logic, Semiconducting wafers, Photomasks, Defect inspection, Image classification, Classification systems, Silicon, Contamination

Proceedings Article | 27 December 2002 Paper
Kunal Taravade, Robert Muller, Susan Erichsrud
Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467246
KEYWORDS: Platinum, Reticles, Etching, Line edge roughness, Dry etching, Wet etching, Photomasks, Edge roughness, Manufacturing, Logic

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