Mr. Rui Qian Profile

Rui Qian

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Lulu Lai, Yuyang Bian, Shaopeng Chen, Biqiu Liu, Rui Qian, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang

Proceedings Volume 11611, 116112J (2021) https://doi.org/10.1117/12.2583567

KEYWORDS: Fin field effect transistors, Signal processing, Optical alignment, Diffusion, Overlay metrology, Lithography, Integrated circuits, Etching

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