Dr. Ryan Callahan Profile

Dr. Ryan Callahan

Business and Technology Director at FUJIFILM Electronic Materials USA Inc

SPIE Involvement:

Conference Program Committee | Author

Publications (3)

Proceedings Article | 1 April 2009 Paper

Aryl sulfonates as neutral photoacid generators (PAGs) for EUV lithography

Robert Sulc, James Blackwell, Todd Younkin, E. Steve Putna, Katherine Esswein, Antonio DiPasquale, Ryan Callahan, Hideaki Tsubaki, Tooru Tsuchihashi

Proceedings Volume 7273, 72733R (2009) https://doi.org/10.1117/12.814279

KEYWORDS: Extreme ultraviolet lithography, Lithography, Photoresist materials, Extreme ultraviolet, Optical lithography, Line width roughness, Molecules, Ionization, Semiconducting wafers, Lithium

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Proceedings Article | 28 May 2004 Paper

Production of novel materials for 157-nm and 193-nm soft pellicles

Paul Zimmerman, Chris van Peski, Daniel Miller, Ryan Callahan, Matthew Cashion

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534350

KEYWORDS: Pellicles, Polymers, Transparency, Ultraviolet radiation, Fluorine, Lithography, Electrons, Polymer thin films, Gases, FT-IR spectroscopy

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Proceedings Article | 12 June 2003 Paper

Negative photoresist for 157-nm microlithography: a progress report

Will Conley, Brian Trinque, Daniel Miller, Stefan Caporale, Brian Osborn, Shiro Kumamoto, Matthew Pinnow, Ryan Callahan, Charles Chambers, Guen Su Lee, Paul Zimmerman, C. Grant Willson

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485194

KEYWORDS: Polymers, Photoresist materials, Transparency, Imaging systems, Spectroscopy, Photomasks, Carbon monoxide, Optical lithography, Binary data, Absorbance

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Conference Committee Involvement (10)

Advances in Patterning Materials and Processes XLII

23 February 2025 | San Jose, California, United States

Advances in Patterning Materials and Processes XLI

26 February 2024 | San Jose, California, United States

Advances in Patterning Materials and Processes XL

27 February 2023 | San Jose, California, United States

Advances in Patterning Materials and Processes XXXIX

25 April 2022 | San Jose, California, United States

Advances in Patterning Materials and Processes XXXVIII

22 February 2021 | Online Only, California, United States

Showing 5 of 10 Conference Committees

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