Programmability is demanding in integrated photonics, while a suitable photonic platform is still lacking. It should have no static power, easy tuning knobs, high endurance, and many operation levels. We report a wide-bandgap PCM antimony sulfide (Sb2S3)-clad silicon photonic platform, based on which essential building blocks for programmable photonics are demonstrated, including micro-ring resonators, Mach-Zehnder Interferometers, and directional couplers. The fabricated devices simultaneously achieved low loss (<1.0 dB), high extinction ratio (>10 dB), high cyclability (>1,600 switching events), and 5-bit (32 operation levels) operation.
We demonstrate a nonvolatile electrically programmable phase-change silicon photonic switch and phase shifter leveraging a monolayer graphene heater with record-high programming energy efficiency (8.7±1.4 aJ/nm3) and endurance (> 1,000 cycles).
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