Dr. Satoru Odate Profile

Dr. Satoru Odate

at Nikon Corp

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Publications (3)

Proceedings Article | 5 October 2023 Presentation + Paper

Fabrication of superconducting quantum circuits on 12-inch wafers using an ArF immersion lithography system

Satoru Odate, Naooki Saito, Kosuke Suzuki, Hajime Aoyama, Koichi Kusuyama, Yasunobu Nakamura, Hiroyuki Tsukamoto

Proceedings Volume 12652, 1265205 (2023) https://doi.org/10.1117/12.2675964

KEYWORDS: Immersion lithography, Superconductors, Fabrication, Semiconducting wafers, Quantum circuits, Quantum communications, Resonators, Quantum systems, Quantum numbers, Quantum computers

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Proceedings Article | 3 October 2017 Presentation

Direct laser writing of carbon nanotubes (Conference Presentation)

Kentaro Yamada, Makoto Nakazumi, Satoru Odate, Koichiro Iwahori

Proceedings Volume 10354, 103540N (2017) https://doi.org/10.1117/12.2272108

KEYWORDS: Carbon nanotubes, Transistors, Fabrication, Coating, Glasses, Multiphoton lithography, Nanolithography, Electronic components, Single walled carbon nanotubes, Objectives

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Proceedings Article | 27 September 2013 Paper

Wide field snapshot imaging polarimeter using modified Savart plates

Naooki Saito, Satoru Odate, Katsura Otaki, Masahiro Kubota, Rintaro Kitahara, Kazuhiko Oka

Proceedings Volume 8873, 88730M (2013) https://doi.org/10.1117/12.2022829

KEYWORDS: Polarimetry, Polarization, Surface plasmons, Calibration, Imaging systems, Distortion, Crystals, Prototyping, Optical design, Geometrical optics

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