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Scott Grimshaw
President/Founder at Tangidyne Corp
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Publications (1)
Proceedings Article | 29 September 2004 Paper
High-temperature film thickness sensors for CVD process control
Proceedings Volume 5527, (2004) https://doi.org/10.1117/12.560442
KEYWORDS: Crystals, Chemical vapor deposition, Gallium, Quartz, Sensors, Network security, Thin films, Temperature metrology, Silica, Electrodes
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