A novel high accuracy form error optical measurement system based on reflective intensity modulation optical fiber
sensor is presented. Combing the optical fiber sensor technology and optical fiber communication technology, the system
is developed by using optical switch to realize the Time Division Multiplex (TMD) of optical fiber sensing array,
improve the system efficiency, reduce cost and suppress errors caused by the movement of optical fiber. SNR (signal
noise ratio) and accuracy of the system are enhanced through lock-in amplifier. The intensity fluctuation of the reference
light is adopted to correct the effects of the power variation of light source and so as to improve stability of the system.
The experiment results show that the resolution of the system is up to 0.1μm and repeatability is about 0.5%. The
architecture of the system is very simple that it can be used in multiple form error measurement of mechanical parts of
different shapes by changing the number and layout of the optical fiber sensor array flexibly.
A non-contact flatness error of small plane measurement method based on reflective optical fiber displacement sensor is
presented. Using the model of single optical fiber, the light from laser source is modulated by the modulator. The
modulated light passes through a circulator to an optical switch to realize the Time Division Multiplex (TMD) of optical
fiber sensing array. The reflective light passes through the circulator to a common detector and process circuit. This
configuration avoids the problem of parameter disagreement of multi-processing circuits, improves the measurement
efficiency and cuts down the cost. The intensity fluctuation of the reference light is adopted to rectify the effects of the
power variation of laser source, so as to improve stability of the system. The experiment results show that the measurand
flatness error is consistent with the measurement result of Three Coordinates Measuring Machine (CMM). The
architecture of the system is simple that it can be used in flatness error measurement of mechanical parts of different
shapes by changing the number and layout of the optical fiber sensing array flexibly.
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