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Shankr Nadarajan
at imec
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Publications (1)
Proceedings Article | 15 March 2023 Presentation + Paper
Imec silicon photonics platforms: performance overview and roadmap
F. Ferraro, P. De Heyn, M. Kim, N. Rajasekaran, M. Berciano, G. Muliuk, D. Bode, G. Lepage, S. Janssen, R. Magdziak, J. De Coster, H. Kobbi, S. Lardenois, N. Golshani, L. Shiramin, C. Marchese, S. Rajmohan, S. Nadarajan, N. Singh, S. Radhakrishnan, A. Tsiara, P. Xu, A. Karagoz, D. Yudistira, M. Martire, A. Shahar, M. Chakrabarti, D. Velenis, W. Guo, A. Miller, Kristof Croes, S. Balakrishnan, P. Verheyen, Y. Ban, J. Van Campenhout, P. Absil
Proceedings Volume 12429, 1242909 (2023) https://doi.org/10.1117/12.2650579
KEYWORDS: Silicon nitride, Silicon, Low pressure chemical vapor deposition, Waveguides, Silicon photonics, Semiconducting wafers, Tunable filters, Plasma enhanced chemical vapor deposition, Integrated optics, Germanium
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