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Dr. Shinichi Matsubara
at Hitachi Ltd
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Publications (2)
Proceedings Article | 24 March 2020 Presentation
Immediate observation of embedded structure after top-down delayering by using “Dig and See” technology for GFIS-SIM based accurate overlay metrology (Conference Presentation)
Shinichi Matsubara, Hiroyasu Shichi, Tomihiro Hashizume, Masami Ikota
Proceedings Volume 11325, 1132513 (2020) https://doi.org/10.1117/12.2551673
Proceedings Article | 26 March 2019 Presentation + Paper
Visualization of 3D structure of semiconductor devices by "Dig and See" using GFIS-SIM
Shinichi Matsubara, Hiroyasu Shichi, Sayaka Tanimoto, Masami Ikota, Tomihiro Hashizume
Proceedings Volume 10959, 109591Y (2019) https://doi.org/10.1117/12.2514934
KEYWORDS: Ions, Ion beams, Scanning electron microscopy, Neon, Argon, Semiconductors, Crystals, Hydrogen, Silicon, Visualization
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