Dr. Shinji Kishimura
Chief Engineer at Panasonic Corp
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 4 April 2007 Paper
Proceedings Volume 6519, 65190E (2007) https://doi.org/10.1117/12.713150
KEYWORDS: Digital watermarking, Thin film coatings, Water, Semiconducting wafers, Crystals, Quartz, Silicon, Immersion lithography, Inspection, Polymers

Proceedings Article | 29 March 2006 Paper
N. Stepanenko, Hyun-Woo Kim, S. Kishimura, D. Van Den Heuvel, N. Vandenbroeck, M. Kocsis, P. Foubert, M. Maenhoudt, M. Ercken, F. Van Roey, R. Gronheid, I. Pollentier, D. Vangoidsenhoven, C. Delvaux, C. Baerts, S. O'Brien, W. Fyen, G. Wells
Proceedings Volume 6153, 615304 (2006) https://doi.org/10.1117/12.660158
KEYWORDS: Thin film coatings, Digital watermarking, Particles, Semiconducting wafers, Immersion lithography, Scanners, Water, Critical dimension metrology, Photomasks, Scatterometry

Proceedings Article | 20 March 2006 Paper
Michael Kocsis, Dieter Van Den Heuvel, Roel Gronheid, Mireille Maenhoudt, Dizana Vangoidsenhoven, Greg Wells, Nickolay Stepanenko, Michael Benndorf, Hyun Woo Kim, Shinji Kishimura, Monique Ercken, Frieda Van Roey, S. O'Brien, Wim Fyen, Philippe Foubert, Richard Moerman, Bob Streefkerk
Proceedings Volume 6154, 615409 (2006) https://doi.org/10.1117/12.660432
KEYWORDS: Semiconducting wafers, Thin film coatings, Water, Particles, Scanners, Immersion lithography, Manufacturing, Scanning electron microscopy, Space operations, Distortion

Proceedings Article | 4 May 2005 Paper
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.598532
KEYWORDS: Ions, Immersion lithography, Water, Lithography, Optical lithography, Analytical research, Quartz, Crystals, Semiconducting wafers, Surface roughness

Proceedings Article | 14 May 2004 Paper
Shinji Kishimura, Masayuki Endo, Masaru Sasago
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534759
KEYWORDS: Water, Immersion lithography, Monochromatic aberrations, Polymers, Ions, Photoresist processing, FT-IR spectroscopy, Semiconducting wafers, Silicon, Metals

Showing 5 of 13 publications
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