Mr. Shinji Sato Profile

Shinji Sato

at Toshiba Corp

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 6 May 2005 Paper

Study of EB-tree

Kazuo Tawarayama, Shunko Magoshi, Shinji Sato, Masayuki Hatano

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598923

KEYWORDS: Semiconducting wafers, Metals, Backscatter, Electron beam lithography, Copper, Lithography, Electron beam direct write lithography, Monte Carlo methods, Critical dimension metrology, Tungsten

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Proceedings Article | 16 June 2003 Paper

Proximity effect correction on multilevel interconnect metal for high-energy electron-beam lithography

Shunko Magoshi, Shinji Sato, Kazuo Tawarayama, Yasuhiro Makino, Hiromi Niiyama

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.483741

KEYWORDS: Metals, Backscatter, Electron beam lithography, Lithography, Silicon, Tungsten, Modulation, Monte Carlo methods, Microelectronics, Aluminum

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Proceedings Article | 4 May 1993 Paper

Discharge-pumped excimer laser with high-speed and low-temperature gas flow

Go Imada, Hirotaka Nakamura, Toshiyuki Komesu, Takashi Honna, Wataru Masuda, Katsumi Masugata, Kiyoshi Yatsui, S. Satoh, Tatsumi Goto, Koichi Yasuoka, Tohru Tamagawa

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144678

KEYWORDS: Excimer lasers, Ions, Neon, Xenon, Optical simulations, Laser development, Particles, Excimers, Chemical lasers, Transducers

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Proceedings Article | 4 May 1993 Paper

Breakdown characteristics in atmosphere by TEA-CO2 laser

Kiyoshi Yatsui, Katsumi Masugata, Takahiro Kuroda, Yoshihito Ohmomo, Go Imada, S. Satoh, Tatsumi Goto, Koichi Yasuoka, Tohru Tamagawa

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144574

KEYWORDS: Plasma, Atmospheric particles, Atmospheric plasma, Atmospheric optics, Electrodes, Electrical breakdown, Channel projecting optics, Carbon dioxide lasers, Chemical lasers, High power lasers

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