Dr. Simon G. Kaplan Profile

Dr. Simon G. Kaplan

Physicist at National Institute of Standards and Technology

SPIE Involvement:

Author | Instructor

Publications (36)

SPIE Journal Paper | 2 March 2021

Design, calibration, and application of a cryogenic low-background infrared radiometer for spectral irradiance and radiance measurements from 4- to 20-μm wavelength

Simon Kaplan, Solomon Woods, Eric Shirley, Adriaan Carter, Timothy Jung, James Proctor, Dale Sears, Jinan Zeng

OE, Vol. 60, Issue 03, 034102, (March 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.3.034102

KEYWORDS: Calibration, Radiometry, Optical filters, Fourier transforms, Cryogenics, Sensors, Black bodies, Infrared radiation, Temperature metrology, Optical engineering

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Proceedings Article | 20 September 2016 Presentation + Paper

Refractive index measurements of Ge

John Burnett, Simon Kaplan, Eric Stover, Adam Phenis

Proceedings Volume 9974, 99740X (2016) https://doi.org/10.1117/12.2237978

KEYWORDS: Germanium, Temperature metrology, Refractive index, Refraction, Refractometry, Prisms, Mirrors, Monochromators, Optical design, Calibration

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Proceedings Article | 25 July 2013 Paper

Calibration of IR test chambers with the missile defense transfer radiometer

Simon Kaplan, Solomon Woods, Adriaan Carter, Timothy Jung

Proceedings Volume 8707, 870709 (2013) https://doi.org/10.1117/12.2015982

KEYWORDS: Calibration, Radiometry, Black bodies, Infrared radiation, Optical filters, Sensors, Collimators, Mirrors, Missiles, Defense and security

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Proceedings Article | 31 May 2012 Paper

Initial testing of a Si:As blocked-impurity-band (BIB) trap detector

Solomon Woods, Simon Kaplan, Timothy Jung, Adriaan Carter, James Proctor

Proceedings Volume 8353, 83533G (2012) https://doi.org/10.1117/12.919563

KEYWORDS: Sensors, Quantum efficiency, Infrared sensors, Fourier transforms, Fabry–Perot interferometers, Calibration, Cryogenics, Infrared detectors, Silicon, Absorption

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Proceedings Article | 13 May 2011 Paper

Calibration and deployment of a new NIST transfer radiometer for broadband and spectral calibration of space chambers (MDXR)

Timothy Jung, Adriaan Carter, Solomon Woods, Simon Kaplan

Proceedings Volume 8015, 80150C (2011) https://doi.org/10.1117/12.883415

KEYWORDS: Calibration, Radiometry, Black bodies, Sensors, Temperature metrology, Optical filters, Polarizers, Infrared radiation, Cryogenics, Data modeling

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Proceedings Article | 20 July 2010 Paper

Cryogenic Fourier transform infrared spectrometer from 4 to 20 micrometers

Simon Kaplan, Solomon Woods, Timothy Jung, Adriaan Carter

Proceedings Volume 7739, 77394D (2010) https://doi.org/10.1117/12.857441

KEYWORDS: Calibration, Black bodies, Sensors, Cryogenics, Spectroscopy, Collimators, Radiometry, Mirrors, Bandpass filters, Infrared radiation

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Proceedings Article | 4 May 2010 Paper

Cryogenic Fourier transform spectrometer for infrared spectral calibrations from 4 to 20 micrometers

Solomon Woods, Simon Kaplan, Timothy Jung, Adriaan Carter, Raju Datla

Proceedings Volume 7660, 76602I (2010) https://doi.org/10.1117/12.850392

KEYWORDS: Calibration, Black bodies, Sensors, Cryogenics, Spectroscopy, Modulation, Infrared spectroscopy, Infrared radiation, Radiometry, Beam splitters

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Proceedings Article | 24 April 2010 Paper

Infrared transfer radiometer for broadband and spectral calibration of space chambers

Timothy Jung, Adriaan Carter, Solomon Woods, Simon Kaplan, Raju Datla

Proceedings Volume 7663, 76630J (2010) https://doi.org/10.1117/12.850384

KEYWORDS: Sensors, Radiometry, Calibration, Helium, Infrared radiation, Black bodies, Liquids, Cryogenics, Optical filters, Spectroscopy

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SPIE Journal Paper | 1 April 2009

Index of refraction of high-index lithographic immersion fluids and its variability

Min Yang, Simon Kaplan, Roger French, John Burnett

JM3, Vol. 8, Issue 02, 023005, (April 2009) https://doi.org/10.1117/12.10.1117/1.3124189

KEYWORDS: Refraction, Water, Refractive index, Prisms, Thermal optics, Lithography, Microfluidics, Absorbance, Temperature metrology, Immersion lithography

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Proceedings Article | 16 March 2009 Paper

Birefringence issues with uniaxial crystals as last lens elements for high-index immersion lithography

John Burnett, Eric Benck, Simon Kaplan, Gabriel Sirat, Chris Mack

Proceedings Volume 7274, 727421 (2009) https://doi.org/10.1117/12.814324

KEYWORDS: Sapphire, Crystals, Birefringence, Polarization, Lithography, Absorption, Anisotropy, Immersion lithography, Lithographic illumination, Double patterning technology

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Proceedings Article | 3 September 2008 Paper

Angle-dependent infrared reflectance measurements in support of VIIRS

Simon Kaplan, Enrique Iglesias, Leonard Hanssen

Proceedings Volume 7082, 70820X (2008) https://doi.org/10.1117/12.798263

KEYWORDS: Reflectivity, Sensors, Mirrors, FT-IR spectroscopy, Gold, Silver, Absorption, Reflectometry, Infrared radiation, Spectroscopy

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Proceedings Article | 15 March 2006 Paper

High-index optical materials for 193nm immersion lithography

John Burnett, Simon Kaplan, Eric Shirley, Deane Horowitz, Wilfried Clauss, Andrew Grenville, Chris Van Peski

Proceedings Volume 6154, 615418 (2006) https://doi.org/10.1117/12.656901

KEYWORDS: Garnet, Spinel, Crystals, Ceramics, Aluminum, Germanium, Oxides, Lutetium, Magnesium, Optical properties

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Proceedings Article | 12 May 2005 Paper

High refractive index immersion fluids for 193 nm immersion lithography

Bridgette Budhlall, Gene Parris, Peng Zhang, Xiaoping Gao, Zarka Zarkov, Brenda Ross, Simon Kaplan, John Burnett

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600025

KEYWORDS: Refractive index, Absorbance, Water, Photoresist materials, Immersion lithography, Absorption, Microfluidics, Ultraviolet radiation, Semiconducting wafers, Fluid dynamics

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Proceedings Article | 12 May 2005 Paper

High-index materials for 193 nm immersion lithography

John Burnett, Simon Kaplan, Eric Shirley, Paul Tompkins, James Webb

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600109

KEYWORDS: Birefringence, Spinel, Crystals, Transmittance, Oxides, Absorption, Immersion lithography, Water, Ultraviolet radiation, Ceramics

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Proceedings Article | 28 May 2004 Paper

Immersion fluid refractive indices using prism minimum deviation techniques

Roger French, Min Yang, Michael Lemon, Ron Synowicki, Greg Pribil, Gerald Cooney, Craig Herzinger, Steven Green, John Burnett, Simon Kaplan

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.537727

KEYWORDS: Prisms, Refractive index, Liquids, Vacuum ultraviolet, Water, Thermal optics, Refraction, Immersion lithography, Nitrogen, Environmental sensing

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SPIE Journal Paper | 1 January 2004

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John Burnett, Simon Kaplan

JM3, Vol. 3, Issue 01, (January 2004) https://doi.org/10.1117/12.10.1117/1.1632501

KEYWORDS: Water, Prisms, Refractive index, Thermal optics, Interferometry, Ultraviolet radiation, Refraction, Silica, Fabry–Perot interferometers, Immersion lithography

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Proceedings Article | 26 September 2003 Paper

Characterization and modeling of the infrared properties of GaP and GaAs

Michael Thomas, David Blodgett, Daniel Hahn, Simon Kaplan

Proceedings Volume 5078, (2003) https://doi.org/10.1117/12.487878

KEYWORDS: Absorption, Gallium arsenide, Transmittance, Data modeling, Temperature metrology, Infrared radiation, Spectroscopy, Thermal modeling, Sensors, Solids

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Proceedings Article | 26 September 2003 Paper

Longwave infrared absorption properties of ZnS and ZnSe

David Blodgett, Michael Thomas, Daniel Hahn, Simon Kaplan

Proceedings Volume 5078, (2003) https://doi.org/10.1117/12.487874

KEYWORDS: Zinc, Absorption, Infrared radiation, Transmittance, Data modeling, Solids, Long wavelength infrared, Spectroscopy, Temperature metrology, Thermal modeling

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Proceedings Article | 26 September 2003 Paper

Characterization and modeling of the infrared properties of diamond and SiC

Daniel Hahn, Michael Thomas, David Blodgett, Simon Kaplan

Proceedings Volume 5078, (2003) https://doi.org/10.1117/12.487875

KEYWORDS: Diamond, Absorption, Silicon carbide, Chemical vapor deposition, Data modeling, Transmittance, Infrared radiation, Temperature metrology, Thermal modeling, Infrared materials

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Proceedings Article | 8 August 2003 Paper

Linearity characterization of NIST's infrared spectral regular transmittance and reflectance scales

Leonard Hanssen, Simon Kaplan

Proceedings Volume 4826, (2003) https://doi.org/10.1117/12.514482

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Proceedings Article | 26 June 2003 Paper

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John Burnett, Simon Kaplan

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.504601

KEYWORDS: Water, Prisms, Thermal optics, Refractive index, Microfluidics, Refraction, Fabry–Perot interferometers, Mirrors, Temperature metrology, Ultraviolet radiation

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Proceedings Article | 25 November 2002 Paper

Measurement of the o-ray and e-ray infrared refractive index and absorption coefficients of sapphire from 10 K to 295 K

Simon Kaplan, Michael Thomas

Proceedings Volume 4822, (2002) https://doi.org/10.1117/12.451770

KEYWORDS: Sapphire, Absorption, Refraction, Fabry–Perot interferometers, Transmittance, Temperature metrology, Prisms, Data modeling, Refractive index, Statistical modeling

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Proceedings Article | 7 September 2001 Paper

Measurement of the infrared refractive index of sapphire as a function of temperature

Di Yang, Michael Thomas, Simon Kaplan

Proceedings Volume 4375, (2001) https://doi.org/10.1117/12.439193

KEYWORDS: Refractive index, Sapphire, Temperature metrology, Thermal optics, Infrared radiation, Fabry–Perot interferometers, Prisms, Spectroscopy, Water, Interferometers

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Proceedings Article | 11 October 2000 Paper

Intercomparison of regular spectral transmittance and reflectance measurements with FTIR- and monochromator-based spectrophotometers

Simon Kaplan, Leonard Hanssen, Edward Early, Maria Nadal

Proceedings Volume 4103, (2000) https://doi.org/10.1117/12.403570

KEYWORDS: Transmittance, Reflectivity, FT-IR spectroscopy, Monochromators, Sensors, Mirrors, Optical spheres, Spectrophotometry, Solids, Optical filters

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Proceedings Article | 11 October 2000 Paper

Development of an adiabatic laser calorimeter

Etsuo Kawate, Leonard Hanssen, Simon Kaplan, Raju Datla

Proceedings Volume 4103, (2000) https://doi.org/10.1117/12.403579

KEYWORDS: Absorption, Temperature metrology, Sensors, Laser development, Copper, Laser applications, Infrared radiation, Potassium, Resistors, Carbon dioxide lasers

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Proceedings Article | 11 October 2000 Paper

Angle-dependent absolute infrared reflectance and transmittance measurements

Simon Kaplan, Leonard Hanssen

Proceedings Volume 4103, (2000) https://doi.org/10.1117/12.403573

KEYWORDS: Reflectivity, Transmittance, Sensors, Polarizers, Mirrors, Silicon, Infrared radiation, Germanium, Optical spheres, Refraction

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Proceedings Article | 11 October 2000 Paper

Infrared refractive index measurements using a new method

Di Yang, Michael Thomas, William Tropf, Simon Kaplan

Proceedings Volume 4103, (2000) https://doi.org/10.1117/12.403589

KEYWORDS: Refractive index, Temperature metrology, Sapphire, Thermal optics, Infrared radiation, Fabry–Perot interferometers, Spectroscopy, Prisms, Transmittance, Error analysis

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Proceedings Article | 25 October 1999 Paper

FT-IR-based ellipsometer using high-quality Brewster-angle polarizers

Simon Kaplan, Leonard Hanssen

Proceedings Volume 3754, (1999) https://doi.org/10.1117/12.366338

KEYWORDS: Sensors, Polarizers, Signal detection, Silicon, Infrared spectroscopy, FT-IR spectroscopy, Ellipsometry, Polarization, Spectroscopy, Infrared radiation

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