Dr. Stéphane Monfray Profile

Dr. Stéphane Monfray

at STMicroelectronics S.A.

SPIE Involvement:

Author

Publications (14)

Proceedings Article | 13 March 2024 Presentation + Paper

Hybrid Fabry-Perot cavity for multispectral analysis: an experimental demonstration

Sandrine Villenave, Fatima Omeis, Stéphane Monfray, Quentin Abadie, Henri Benisty

Proceedings Volume 12897, 128970F (2024) https://doi.org/10.1117/12.3005181

KEYWORDS: Tunable filters, Optical filters, Optical gratings, CMOS sensors, Silicon, Optical transmission, Fabry Perot interferometers, Design, Semiconducting wafers

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Proceedings Article | 19 April 2021 Presentation

Hybrid silicon photonics based on doped-crystalline oxides for on-chip light amplification

Alicia Ruiz-Caridad, Guillaume Marcaud, Christian Lafforgue, Xavier Le Roux, Joan Manel Ramirez, Elena Durán-Valdeiglesias, Ludovic Largeau, Thomas Maroutian, Sylvia Matzen, Stephane Collin, Carlos Alonso-Ramos, Guillaume Agnus, Sylvain Guerbert, Stephane Monfray, Frederic Boeuf, Vladyslav Vakarin, Eric Cassan, Delphine Marris-Morini, Philippe Lecoeur, Laurent Vivien

Proceedings Volume 11775, 117750B (2021) https://doi.org/10.1117/12.2589287

KEYWORDS: Silicon photonics, Silicon, Oxides, Waveguides, Light wave propagation, Kerr effect, Zirconium dioxide, Ultraviolet radiation, Transparency, Refractive index

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Proceedings Article | 18 April 2021 Presentation

Efficient dual-band grating coupler for 10 Gbit passive optical networks fabricated by 193-nm deep-ultraviolet lithography

David González-Andrade, Diego Pérez-Galacho, Miguel Montesinos-Ballester, Xavier Le Roux, Eric Cassan, Delphine Marris-Morini, Pavel Cheben, Nathalie Vulliet, Stephane Monfray, Frédéric Boeuf, Laurent Vivien, Aitor Villafranca Velasco, Carlos Alonso-Ramos

Proceedings Volume 11775, 117750H (2021) https://doi.org/10.1117/12.2589704

KEYWORDS: Passive optical networks, Lithography, Deep ultraviolet, Waveguides, Silicon, Wave propagation, Single mode fibers, Reflectivity, Photonic devices, Oxides

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Proceedings Article | 5 March 2021 Presentation + Paper

Si capacitive modulator integration in a 300mm silicon photonics platform using different annealing conditions

I. Charlet, L. Deniel, P. Acosta-Alba, Y. Désières, S. Guerber, S. Kerdilès, J. Lassarre, C. Perrot, C. Euvrard-Colnat, K. Ribaud, P. Grosse, M. Gregoire, K. Rovayaz, L. Mazet, S. Cremer, N. Vulliet, S. Monfray, S. Messaoudène, D. Marris-Morini, F. Boeuf

Proceedings Volume 11691, 116910R (2021) https://doi.org/10.1117/12.2577806

KEYWORDS: Modulators, Silicon, Annealing, Silicon photonics, Waveguides, Transmitters, Transceivers, Oxides, Optoelectronics

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Proceedings Article | 5 March 2021 Presentation

Frequency comb generation and dual comb spectrocopy using silicon modulators

Delphine Marris-Morini, Lucas Deniel, Erwan Weckenmann, Stephane Monfray, Diego Pérez Galacho, Carlos Alonso Ramos, Laurent Bramerie, Margaux Barbier, Frédéric Boeuf, Laurent Vivien, Christophe Peucheret

Proceedings Volume 11689, 116890F (2021) https://doi.org/10.1117/12.2586606

KEYWORDS: Silicon, Modulators, Frequency combs, Wavelength division multiplexing, Spectroscopy, Electro optics, Data communications

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Proceedings Article | 5 March 2021 Presentation + Paper

Fast optical phased array on a 300-mm silicon platform

C. Barrera, S. Guerber, D. Fowler, S. Monfray, A. Montagne, A. Myko, P. Grosse, K. Ribaud, P. Lemaitre, S. Cremer, I. Charlet, L. Vivien, F. Boeuf

Proceedings Volume 11690, 1169007 (2021) https://doi.org/10.1117/12.2582776

KEYWORDS: Phased array optics, Silicon, Waveguides, Modulators, LIDAR, Free space optics, Telecommunications, System integration, Spatial resolution, Solid state electronics

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Proceedings Article | 2 April 2020 Presentation + Paper

Si capacitive modulator integration in a 300mm silicon photonics platform with strained-SiGe to enhance the electro-optic effect

I. Charlet, M. Douix, S. Guerber, N. Michit, C. Barrera, J. Gaudy, Y. Désières, S. Kerdilès, P. Acosta-Abla, J. Lassarre, C. Perrot, C. Euvard-Colnat, K. Rovayaz, D. Pellissier-Tanon, S. Cremer, N. Vulliet, P. Grosse, S. Monfray, S. Messaoudène, L. Vivien, B. Szelag, D. Marris-Morini, F. Boeuf

Proceedings Volume 11364, 1136406 (2020) https://doi.org/10.1117/12.2556460

KEYWORDS: Modulators, Silicon, Electro optics, Crystals, Oxides, Amorphous silicon, Silicon photonics, Plasma, Dispersion, Modulation

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Proceedings Article | 2 April 2020 Presentation

Ultra-wideband flat anomalous dispersion in nanostructured silicon membrane waveguides (Conference Presentation)

Thi Thuy Duong Dinh, Jianhao Zhang, Miguel Montesinos, Xavier Le Roux, Christian Lafforgue, Daniel Benedikovic, Pavel Cheben, Eric Cassan, Delphine Marris-Morini, Gregory Maisons, Mathieu Carras, Sebastien Cremer, Stephane Monfray, Frederic Boeuf, Laurent Vivien, Carlos Alonso-Ramos

Proceedings Volume 11364, 113641E (2020) https://doi.org/10.1117/12.2555819

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Proceedings Article | 2 April 2020 Presentation + Paper

Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform

S. Monfray, S. Cremer, N. Vulliet, E. Dubois, F. Domengie , S. Jan, F. Baille, F. Boeuf

Proceedings Volume 11364, 1136403 (2020) https://doi.org/10.1117/12.2554725

KEYWORDS: Modulators, Silicon, Silicon photonics, Doping, Photonics, Waveguides, Modulation, Manufacturing, Germanium

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Proceedings Article | 1 April 2020 Presentation

What can orthogonal surface functionalizations provide to point-of-care testing? (Conference Presentation)

Jian Zhang, Francisco Palazon, Christelle Yeromonahos, Radoslaw Mazurczyk, Thomas Géhin, Claude Botella, Geneviève Grenet, Didier Léonard, Stéphane Monfray, Julien Moreau, Michael Canva, Yann Chevolot, Emmanuel Maillart, Jean-Pierre Cloarec

Proceedings Volume 11361, 1136108 (2020) https://doi.org/10.1117/12.2560154

KEYWORDS: Point-of-care devices, Chemical analysis, Gold, Silica, Biosensors, Transducers, Molecular self-assembly, Titanium, Tungsten, Nanoparticles

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MicroAnalytical Systems (µAS) adapted to Point-of-Care Testing are expected to provide simple chemical, molecular or cellular analysis to be used directly on the field. Different formats of µAS are already classically used, from pregnancy tests to glycemia for diabetic people. Increasing µAS analytical performances involves for instance improving limits of detection, reduce time of analysis, or increase the amount of information provided per test. These improvements may be reached by using more refined technology, involving integrated technologies such as biosample processing, enzymatic reactions, fluidic circuitry and/or biosensors. However being able to fabricate and produce cheap µAS relying on miniaturized components is still a challenging goal, particularly when dealing with low concentrated species. For example, on the one hand it may be interesting to use miniaturize nanotransducers in biosensors (e.g. photonic transducer enabling both SPR and SERS thanks to nanostructuration) ; but on the other hand the transducers size reduction may prevent the targets to reach the biosensor’s active zone in a short time, because of mass transfer phenomena. Futhermore, when the sensing area is small by comparison with the other µAS zones, it targets are likely to get adsorbed on undesired surfaces. These targets are therefore lost and cannot contribute to the final, useful signal of the µAS. In these conditions the effectivity of the µAS can be questionned. Different ways are being explored to overcome such challenges, and may enable µAS for detection of low concentration targets. For instance, it is possible to perform selective chemical modifications of surfaces bearing different materials, in order to bind molecular probes only on the transducing zone, while repelling molecular targets from other material surfaces. We will show how it is possible to perform such orthogonal surfaces modifications with a submicronic spatial resolution, relying on self-assembly phenomena.

Proceedings Article | 1 April 2020 Presentation

Improving silicon nitride ring resonator performances on 300 mm industrial environment for point of care applications (Conference Presentation)

Michele Calvo, Guillaume Beaudin, Laurence Mercier-Coderre, Pauline Girault, Pedro Rojo-Romeo, Regis Orobtchouk, Romain Stricher, Stephane Monfray, Serge Ecoffey, Dominique Drouin, Frederic Boeuf, Michael Canva, Paul Charette

Proceedings Volume 11361, 1136105 (2020) https://doi.org/10.1117/12.2555339

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Point-of-care tests (POCT) are important for detecting illnesses and monitoring patients without the need of a medical laboratory. To be useful, POCT must be sensitive, specific, integrated, and affordable. Since the early 2000s, integrated photonics have offered a possible solution for this problem. In particular, silicon micro-ring resonators represent a compact and sensitive choice known in the industry. This paper details the design, fabrication, and characterization of two methods for improving the performance of ring resonators by engineering their cross section. More precisely, improving devices made out of silicon nitride in an industrial environment to work in the infrared (around 1.31 µm). The first approach is to selectively excite the first order mode of the ring resonator’s waveguide. The first order mode, with its greater exposure to the sensing liquid than the fundamental mode, results in a higher device sensitivity. The second method consists in coupling a dielectric mode with a surface plasmon polariton (SPP) forming a hybrid plasmonic waveguide. Hybrid plasmonic waveguides combine the low losses of the dielectric mode with the high sensitivity of the SPP, which increases the sensitivity in comparison to conventional dielectric ring resonators. Furthermore, hybrid plasmonic micro-ring resonators make possible a stable and easy differential functionalization. Through the optical characterization of the devices, this study shows an experimental sensitivity of first order ring resonators of over 200 nm/RIU* and of hybrid plasmonic devices of 300 nm/RIU*. This demonstrates improvement with respect to the reference silicon nitride dielectric ring (120 nm/RIU*). Characterizations were performed using a PolyDiMethylSiloxane (PDMS) fluidic system to prove the compatibility of the substrate to POCT applications. This paper shows two alternative approaches to integrated nano-photonic sensing for point of care testing. The proposed structures, demonstrate not only a higher sensitivity, but consider selectivity and manufacturing issues, which are fundamental for POCT development. *RIU = Refractive Index Unit

Proceedings Article | 17 April 2017 Presentation + Paper

New approach to improve the energy density of hybrid electret-dielectric elastomer generators

Clara Lagomarsini, Claire Jean-Mistral, Stephane Monfray, Alain Sylvestre

Proceedings Volume 10163, 101632C (2017) https://doi.org/10.1117/12.2259933

KEYWORDS: Electrodes, Dielectric polarization, Prototyping, Capacitance, Dielectrics, Finite element methods, Polarization, Carbon, Diodes, Copper

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Proceedings Article | 19 August 2014 Paper

Case study of piezoelectric flexible thin films in pulse excited electromechanical transducers

Natalia Salamon, Roman Gozdur, Marcin Turczyński, Zbigniew Lisik, Ulrich Soupremanien, Emmanuel Ollier, Stéphane Monfray, Thomas Skotnicki

Proceedings Volume 9291, 92910M (2014) https://doi.org/10.1117/12.2073488

KEYWORDS: Transducers, Ferroelectric polymers, Solar energy, Thin films, Capacitance, Thin film devices, Energy harvesting, Energy efficiency, Electronic circuits, Energy conversion efficiency

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Proceedings Article | 19 August 2014 Paper

Thermal energy harvesters with piezoelectric or electrostatic transducer

Piotr Prokaryn, Krzysztof Domański, Michał Marchewka, Daniel Tomaszewski, Piotr Grabiec, Onoriu Puscasu, Stéphane Monfray, Thomas Skotnicki

Proceedings Volume 9291, 92910E (2014) https://doi.org/10.1117/12.2070512

KEYWORDS: Capacitors, Transducers, Electrodes, Aluminum, Silicon, Data acquisition, Polymethylmethacrylate, Silica, Capacitance, Diodes

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Showing 5 of 14 publications

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