Prof. Susan Trolier-McKinstry Profile

Prof. Susan Trolier-McKinstry

Professor of Ceramic Science and Engineering at Pennsylvania State Univ

SPIE Involvement:

Author

Publications (44)

Proceedings Article | 5 October 2023 Poster + Paper

Poster + Paper

Thin-film PZT actuator performance in adjustable x-ray optic segments

Kenneth Buffo, Casey DeRoo, Paul Reid, Vladimir Kradinov, Vanessa Marquez, Susan Trolier-McKinstry, Nathan Bishop, Thomas Jackson, Quyen Tran, Hanyuan Liang, Tianning Liu, Mohit Tendulkar

Proceedings Volume 12679, 1267915 (2023) https://doi.org/10.1117/12.2675949

KEYWORDS: Mirrors, Iterated function systems, Actuators, X-ray optics, Finite element methods, X-rays, Ferroelectric materials, Thin films, Piezoelectric thin film actuators, Electrodes

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Proceedings Article | 5 October 2023 Presentation

Presentation

Enhancement of second-order optical nonlinearities and UV second harmonic generation from periodically poled boron-substituted aluminum nitride thin films

Albert Suceava, John Hayden, Kyle Kelley, Yihuang Xiong, Ismaila Dabo, Susan Trolier-McKinstry, Jon-Paul Maria, Venkatraman Gopalan

Proceedings Volume PC12652, PC1265202 (2023) https://doi.org/10.1117/12.2677814

KEYWORDS: Second harmonic generation, Ultraviolet radiation, Nonlinear optics, Aluminum nitride, Thin films, Waveguides, Ranging, Photonic devices, Optical properties, Nonlinear optical materials

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SPIE Journal Paper | 2 June 2022

Stress-balancing in piezoelectric adjustable x-ray optics

Nathan Bishop, Vladimir Kradinov, Paul Reid, Thomas Jackson, Casey DeRoo, Susan Trolier-McKinstry

JATIS, Vol. 8, Issue 02, 029004, (June 2022) https://doi.org/10.1117/12.10.1117/1.JATIS.8.2.029004

KEYWORDS: Mirrors, Actuators, X-ray optics, X-rays, Thin films, Glasses, Iridium, Coating, Prototyping, Sputter deposition

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Proceedings Article | 23 August 2021 Presentation + Paper

Presentation + Paper

Process development for adjustable X-ray mirrors

Mohit Tendulkar, Tianning Liu, Nicole Kirchner-Hall, Nathan Bishop, Quyen Tran, Casey DeRoo, Vincenzo Cotroneo, Vladimir Kradinov, Vanessa Marquez, Paul Reid, Susan Trolier-McKinstry, Thomas Jackson

Proceedings Volume 11822, 1182213 (2021) https://doi.org/10.1117/12.2595316

KEYWORDS: Active optics, Thin film devices, Piezoelectric thin film actuators, X-ray optics, Mirrors, X-rays, Actuators, Ferroelectric materials, Zinc oxide, Lithography

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Proceedings Article | 5 August 2021 Presentation

Presentation

Optical metrology of an adjustable x-ray mirror prototype

Casey DeRoo, Paul Reid, Vanessa Marquez, Vladimir Kradinov, Susan Trolier-McKinstry, Nathan Bishop, Thomas Jackson, Mohit Tendulkar, Quyen Tran

Proceedings Volume 11822, 118220Z (2021) https://doi.org/10.1117/12.2594726

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Proceedings Article | 1 August 2021 Presentation

Presentation

Strain gauging for on-orbit figure monitoring of adjustable X-ray optics: systems analyses

Paul Reid, Vladimir Kradinov, Mark Freeman, Nathan Bishop, Casey DeRoo, Thomas Jackson, Vanessa Marquez, Mohit Tendulkar, Quyen Tran, Susan Trolier-McKinstry

Proceedings Volume 11822, 1182214 (2021) https://doi.org/10.1117/12.2595160

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Proceedings Article | 29 March 2019 Open Access

Open Access

Presentation

Piezoelectric films for MEMS applications (Conference Presentation)

Susan Trolier-McKinstry

Proceedings Volume 10967, 1096702 (2019) https://doi.org/10.1117/12.2507279

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SPIE Journal Paper | 23 March 2019 Open Access

Open Access

Thickness distribution of sputtered films on curved substrates for adjustable x-ray optics

Nathan Bishop, Julian Walker, Casey DeRoo, Tianning Liu, Mohit Tendulkar, Vincenzo Cotroneo, Edward Hertz, Vladimir Kradinov, Eric Schwartz, Paul Reid, Thomas Jackson, Susan Trolier-McKinstry

JATIS, Vol. 5, Issue 02, 021005, (March 2019) https://doi.org/10.1117/12.10.1117/1.JATIS.5.2.021005

KEYWORDS: Mirrors, X-ray optics, Sputter deposition, Finite element methods, Glasses, Ferroelectric materials, X-rays, Actuators, Prototyping, Mathematical modeling

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Piezoelectric adjustable x-ray optics use magnetron sputtered thin film coatings on both sides of a thin curved glass substrate. To produce an optic suitable for a mission requiring high-angular resolution like “Lynx,” the integrated stresses (stress×thickness) of films on both sides of the optic must be approximately equal. Thus, understanding how sputtered film thickness distributions change for convex and concave curved substrates is necessary. To address this, thickness distributions of piezoelectric Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3 films are studied on flat, convex, and concave cylindrical substrates with a 220-mm radius of curvature. A mathematical model of the film thickness distribution is derived based on the geometric properties of the sputter tool and the substrate, and film thicknesses deposited with a commercially available sputtering tool are measured with spectroscopic ellipsometry. Experiment and modeled results for flat and convex curved substrates demonstrate good agreement, with average relative thickness distribution difference of 0.19% and −0.10% respectively, and a higher average difference of 1.4% for concave substrates. The calculated relative thickness distributions are applied to the convex and concave sides of a finite-element analysis (FEA) model of an adjustable x-ray optic prototype. The FEA model shows that, left uncorrected, the relative film thickness variation will yield an optic with an optical performance of 2.6 arc sec half power diameter (HPD) at 1 keV. However, the mirror figure can be corrected to diffraction-limited performance (0.3 arc sec HPD) using the piezoelectric adjusters, suggesting that the tolerances for applying a balanced integrated stress on both sides of a mirror are alleviated for adjustable x-ray optics as compared to traditional static x-ray mirrors. Furthermore, the piezoelectric adjusters will also allow changes in mirror figure over the telescope lifetime due to drift in the stress states of the x-ray surfaces to be corrected on orbit.

Proceedings Article | 27 February 2019 Paper

Paper

Ring PMUT array based miniaturized photoacoustic endoscopy device

Ajay Dangi, Sumit Agrawal, Sudhanshu Tiwari, Shubham Jadhav, Christopher Cheng, Gaurav Ramesh Datta, Susan Trolier-McKinstry, Rudra Pratap, Sri-Rajasekhar Kothapalli

Proceedings Volume 10878, 1087811 (2019) https://doi.org/10.1117/12.2510000

KEYWORDS: Photoacoustic spectroscopy, Endoscopy, Optical fibers, Aluminum nitride, Ultrasonography, Photoacoustic imaging, Thin films, Sputter deposition, Semiconducting wafers, Transducers

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Proceedings Article | 26 October 2018 Presentation + Paper

Presentation + Paper

Progress in development of adjustable optics for x-ray astronomy

Vincenzo Cotroneo, Casey DeRoo, Thomas Jackson, Vladimir Kradinov, Tianning Liu, Vanessa Marquez, Paul Reid, Daniel Schwartz, Eric Schwartz, Mohit Tendulkar, Susan Trolier-McKinstry, Julian Walker

Proceedings Volume 10761, 1076109 (2018) https://doi.org/10.1117/12.2323283

KEYWORDS: Mirrors, Optics manufacturing, Ferroelectric materials, X-ray optics, Glasses, Prototyping, X-ray telescopes, Actuators, Crystals, Electronics

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SPIE Journal Paper | 19 March 2018

Deterministic figure correction of piezoelectrically adjustable slumped glass optics

Casey DeRoo, Ryan Allured, Vincenzo Cotroneo, Edward Hertz, Vanessa Marquez, Paul Reid, Eric Schwartz, Alexey Vikhlinin, Susan Trolier-McKinstry, Julian Walker, Thomas Jackson, Tianning Liu, Mohit Tendulkar

JATIS, Vol. 4, Issue 01, 019004, (March 2018) https://doi.org/10.1117/12.10.1117/1.JATIS.4.1.019004

KEYWORDS: Mirrors, Iterated function systems, X-ray optics, Metrology, Glasses, Composites, Optics manufacturing, Finite element methods, Ferroelectric materials, X-rays

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Proceedings Article | 19 September 2017 Presentation + Paper

Presentation + Paper

Lynx Mission concept status

Jessica Gaskin, Ryan Allured, Simon Bandler, Stefano Basso, Marshall Bautz, Michael Baysinger, Michael Biskach, Tyrone Boswell, Peter Capizzo, Kai-Wing Chan, Marta Civitani, Lester Cohen, Vincenzo Cotroneo, Jacqueline Davis, Casey DeRoo, Michael DiPirro, Alexandra Dominguez, Leo Fabisinski, Abraham Falcone, Enectali Figueroa-Feliciano, Jay Garcia, Karen Gelmis, Ralf Heilmann, Randall Hopkins, Thomas Jackson, Kiranmayee Kilaru, Ralph Kraft, Tianning Liu, Ryan McClelland, Randy McEntaffer, Kevin McCarley, John Mulqueen, Feryal Özel, Giovanni Pareschi, Paul Reid, Raul Riveros, Mitchell Rodriguez, Justin Rowe, Timo Saha, Mark Schattenburg, Andrew Schnell, Daniel Schwartz, Peter Solly, Robert Suggs, Steven Sutherlin, Douglas Swartz, Susan Trolier-McKinstry, James Tutt, Alexey Vikhlinin, Julian Walker, Wonsik Yoon, William Zhang

Proceedings Volume 10397, 103970S (2017) https://doi.org/10.1117/12.2273911

KEYWORDS: X-rays, Astrophysics, Galactic astronomy, Environmental sensing, Stars, Planetary systems, X-ray optics, Observatories

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Proceedings Article | 29 August 2017 Presentation + Paper

Presentation + Paper

Design and fabrication of adjustable x-ray optics using piezoelectric thin films

J. Walker, T. Liu, M. Tendulkar, D. Burrows, C. DeRoo, R. Allured, E. Hertz, V. Cotroneo, P. Reid, E. Schwartz, T. Jackson, S. Trolier-McKinstry

Proceedings Volume 10399, 103991K (2017) https://doi.org/10.1117/12.2275351

KEYWORDS: Mirrors, Thin films, X-ray optics, Glasses, Ferroelectric materials, X-rays, Electrodes, Modulation, Coating, Radio optics

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Proceedings Article | 29 August 2017 Presentation + Paper

Presentation + Paper

Deterministic figure correction of piezoelectrically adjustable slumped glass optics

Casey DeRoo, Ryan Allured, Vincenzo Cotroneo, Edward Hertz, Vanessa Marquez, Paul Reid, Eric Schwartz, Alexey Vikhlinin, Susan Trolier-McKinstry, Julian Walker, Thomas Jackson, Tianning Liu, Mohit Tendulkar

Proceedings Volume 10399, 103991M (2017) https://doi.org/10.1117/12.2275210

KEYWORDS: X-ray optics, Glasses, X-rays, Mirrors, Thin films, Actuators, Thermography, Optical fabrication, Metrology, Testing and analysis

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Proceedings Article | 27 October 2016 Paper

Paper

Toward large-area sub-arcsecond x-ray telescopes II

Stephen O'Dell, Ryan Allured, Andrew Ames, Michael Biskach, David Broadway, Ricardo Bruni, David Burrows, Jian Cao, Brandon Chalifoux, Kai-Wing Chan, Yip-Wah Chung, Vincenzo Cotroneo, Ronald Elsner, Jessica Gaskin, Mikhail Gubarev, Ralf Heilmann, Edward Hertz, Thomas Jackson, Kiranmayee Kilaru, Jeffrey Kolodziejczak, Ryan McClelland, Brian Ramsey, Paul Reid, Raul Riveros, Jacqueline Roche, Suzanne Romaine, Timo Saha, Mark Schattenburg, Daniel Schwartz, Eric Schwartz, Peter Solly, Susan Trolier-McKinstry, Melville Ulmer, Alexey Vikhlinin, Margeaux Wallace, Xiaoli Wang, David Windt, Youwei Yao, Shi Ye, William Zhang, Heng Zuo

Proceedings Volume 9965, 996507 (2016) https://doi.org/10.1117/12.2238247

KEYWORDS: X-ray telescopes, Mirrors, Coating, X-ray optics, Silicon, Ion implantation, X-rays, Thin films, Ions, Iridium

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Proceedings Article | 17 August 2016 Paper

Paper

Laboratory demonstration of the piezoelectric figure correction of a cylindrical slumped glass optic

Ryan Allured, Edward Hertz, Vanessa Marquez, Vincenzo Cotroneo, Margeaux Wallace, Bianca Salmaso, Marta Civitani, Susan Trolier-McKinstry, Alexey Vikhlinin, Giovanni Pareschi, Paul Reid

Proceedings Volume 9905, 990554 (2016) https://doi.org/10.1117/12.2233827

KEYWORDS: X-ray optics, X-rays, Observatories, Glasses, Mirrors, Iterated function systems, Metrology, Contrast transfer function, Calibration, Platinum

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Proceedings Article | 23 September 2015 Paper

Paper

Using iridium films to compensate for piezo-electric materials processing stresses in adjustable x-ray optics

A. Ames, R. Bruni, V. Cotroneo, R. Johnson-Wilke, T. Kester, P. Reid, S. Romaine, S. Tolier-McKinstry, R. H. T. Wilke

Proceedings Volume 9603, 96031I (2015) https://doi.org/10.1117/12.2191404

KEYWORDS: Glasses, Mirrors, Ferroelectric materials, X-ray optics, Iridium, X-rays, Coating, Silicon, Semiconducting wafers, Electrodes

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Proceedings Article | 4 September 2015 Paper

Paper

Improved control and characterization of adjustable x-ray optics

Ryan Allured, Sagi Ben-Ami, Vincenzo Cotroneo, Vanessa Marquez, Stuart McMuldroch, Paul Reid, Daniel Schwartz, Susan Trolier-McKinstry, Alexey Vikhlinin, Margeaux Wallace

Proceedings Volume 9603, 96031M (2015) https://doi.org/10.1117/12.2186411

KEYWORDS: Mirrors, Contrast transfer function, Metrology, Actuators, Calibration, X-ray optics, Finite element methods, Electrodes, Ferroelectric materials, Spatial frequencies

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Proceedings Article | 3 October 2014 Paper

Paper

Development status of adjustable grazing incidence optics for 0.5 arcsecond x-ray imaging

Paul Reid, Thomas Aldcroft, Ryan Allured, Vincenzo Cotroneo, Raegan Johnson-Wilke, Vanessa Marquez, Stuart McMuldroch, Stephen O'Dell, Brian Ramsey, Daniel Schwartz, Susan Trolier-McKinstry, Alexey Vikhlinin, Rudeger H. Wilke, Rui Zhao

Proceedings Volume 9208, 920807 (2014) https://doi.org/10.1117/12.2063305

KEYWORDS: Mirrors, X-ray optics, Wavefront sensors, Ferroelectric materials, Actuators, X-rays, X-ray imaging, Grazing incidence, Electrodes, Observatories

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Proceedings Article | 17 September 2014 Paper

Paper

Toward large-area sub-arcsecond x-ray telescopes

Stephen O'Dell, Thomas Aldcroft, Ryan Allured, Carolyn Atkins, David Burrows, Jian Cao, Brandon Chalifoux, Kai-Wing Chan, Vincenzo Cotroneo, Ronald Elsner, Michael Graham, Mikhail Gubarev, Ralf Heilmann, Raegan Johnson-Wilke, Kiranmayee Kilaru, Jeffery Kolodziejczak, Charles Lillie, Stuart McMuldroch, Brian Ramsey, Paul Reid, Raul Riveros, Jacqueline Roche, Timo Saha, Mark Schattenburg, Daniel Schwartz, Susan Trolier-McKinstry, Melville Ulmer, Semyon Vaynman, Alexey Vikhlinin, Xiaoli Wang, Martin Weisskopf, Rudeger H. Wilke, William Zhang

Proceedings Volume 9208, 920805 (2014) https://doi.org/10.1117/12.2061882

KEYWORDS: Mirrors, X-rays, Ions, X-ray telescopes, Space telescopes, Telescopes, X-ray optics, Neodymium, X-ray astronomy, Silicon

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Proceedings Article | 17 September 2014 Paper

Paper

Technology requirements for a square meter, arcsecond resolution telescope for x-rays: the SMART-X mission

Daniel Schwartz, Ryan Allured, Jay Bookbinder, Vincenzo Cotroneo, William Forman, Mark Freeman, Stuart McMuldroch, Paul Reid, Harvey Tananbaum, Alexey Vikhlinin, Raegan Johnson-Wilke, Susan Trolier-McKinstry, Rudeger H. Wilke, Thomas Jackson, J. Israel Ramirez, Mikhail Gubarev, Jeffery Kolodziejczak, Stephen O'Dell, Brian Ramsey

Proceedings Volume 9208, 920806 (2014) https://doi.org/10.1117/12.2063469

KEYWORDS: Mirrors, X-rays, X-ray telescopes, X-ray technology, Observatories, Glasses, X-ray optics, Space telescopes, Space operations, Telecommunications

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Proceedings Article | 5 September 2014 Paper

Paper

ZnO thin film transistors and electronic connections for adjustable x-ray mirrors: SMART-X telescope

R. Johnson-Wilke, R. H. Wilke, M. Wallace, J. Ramirez, Z. Prieskorn, J. Nikoleyczik, V. Cotroneo, R. Allured, D. Schwartz, S. McMuldroch, P. Reid, D. Burrows, T. Jackson, S. Trolier-McKinstry

Proceedings Volume 9208, 920809 (2014) https://doi.org/10.1117/12.2063369

KEYWORDS: Ferroelectric materials, Zinc oxide, Transistors, Mirrors, Thin films, Glasses, LabVIEW, Electrodes, X-ray telescopes, Telescopes

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Proceedings Article | 24 July 2014 Paper

Paper

Measuring the performance of adjustable x-ray optics with wavefront sensing

Ryan Allured, Vincenzo Cotroneo, Raegan Johnson-Wilke, Vanessa Marquez, Stuart McMuldroch, Paul Reid, Daniel Schwartz, Susan Trolier-McKinstry, Alexey Vikhlinin, Rudeger Wilke

Proceedings Volume 9144, 91441D (2014) https://doi.org/10.1117/12.2054918

KEYWORDS: Mirrors, Actuators, Glasses, Wavefront sensors, Metrology, X-ray optics, Finite element methods, Electrodes, X-rays, Coating

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Proceedings Article | 26 September 2013 Paper

Paper

Development status of adjustable grazing incidence optics for 0.5 arc second x-ray imaging

Paul Reid, Thomas Aldcroft, Vincenzo Cotroneo, William Davis, Raegan Johnson-Wilke, Stuart McMuldroch, Brian Ramsey, Daniel Schwartz, Susan Trolier-McKinstry, Alexey Vikhlinin, Rudeger H. Wilke

Proceedings Volume 8861, 88611Q (2013) https://doi.org/10.1117/12.2026429

KEYWORDS: Mirrors, Ferroelectric materials, X-ray optics, X-ray imaging, Grazing incidence, Actuators, Neodymium, Metrology, Electrodes, Image resolution

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Proceedings Article | 19 October 2012 Paper

Paper

Adjustable grazing incidence x-ray optics based on thin PZT films

Vincenzo Cotroneo, William Davis, Vanessa Marquez, Paul Reid, Daniel Schwartz, Raegan Johnson-Wilke, Susan Trolier-McKinstry, Rudeger H. Wilke

Proceedings Volume 8503, 850309 (2012) https://doi.org/10.1117/12.931228

KEYWORDS: Actuators, Mirrors, Glasses, Ferroelectric materials, X-ray optics, Sputter deposition, Thin films, Electrodes, X-ray telescopes, Annealing

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Proceedings Article | 15 October 2012 Paper

Paper

Toward active x-ray telescopes II

Stephen O'Dell, Thomas Aldcroft, Carolyn Atkins, Timothy Button, Vincenzo Cotroneo, William Davis, Peter Doel, Charlotte Feldman, Mark Freeman, Mikhail Gubarev, Raegan Johnson-Wilke, Jeffery Kolodziejczak, Charles Lillie, Alan Michette, Brian Ramsey, Paul Reid, Daniel Rodriguez Sanmartin, Timo Saha, Daniel Schwartz, Susan Trolier-McKinstry, Melville Ulmer, Rudeger H. Wilke, Richard Willingale, William Zhang

Proceedings Volume 8503, 850307 (2012) https://doi.org/10.1117/12.930090

KEYWORDS: Mirrors, X-ray telescopes, X-rays, X-ray optics, Actuators, Observatories, Spatial resolution, Magnetism, Active optics, X-ray imaging

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Proceedings Article | 15 October 2012 Paper

Paper

The square meter arcsecond resolution x-ray telescope: SMART-X

Daniel Schwartz, Thomas Aldcroft, Jay Bookbinder, Vincenzo Cotroneo, William Davis, William Forman, Mark Freeman, Stuart McMuldroch, Paul Reid, Harvey Tananbaum, Alexey Vikhlinin, Susan Trolier-McKinstry, Derek Wilke, Raegan Johnson-Wilke

Proceedings Volume 8503, 850308 (2012) https://doi.org/10.1117/12.930868

KEYWORDS: Mirrors, X-rays, Observatories, Glasses, Telescopes, Galactic astronomy, X-ray telescopes, Spatial resolution, Spectrometers, Cameras

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Proceedings Article | 15 October 2012 Paper

Paper

Improving yield of PZT piezoelectric devices on glass substrates

Raegan Johnson-Wilke, Rudeger H. Wilke, Vincenzo Cotroneo, William Davis, Paul Reid, Daniel Schwartz, Susan Trolier-McKinstry

Proceedings Volume 8503, 85030A (2012) https://doi.org/10.1117/12.929239

KEYWORDS: Ferroelectric materials, Glasses, Electrodes, Platinum, Crystals, Semiconducting wafers, Sputter deposition, Yield improvement, Capacitors, Actuators

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Proceedings Article | 17 September 2012 Paper

Paper

Technology development of adjustable grazing incidence x-ray optics for sub-arc second imaging

P. Reid, T. Aldcroft, V. Cotroneo, W. Davis, R. Johnson-Wilke, S. McMuldroch, B. Ramsey, D. Schwartz, S. Trolier-McKinstry, A. Vikhlinin, R. H. Wilke

Proceedings Volume 8443, 84430T (2012) https://doi.org/10.1117/12.926930

KEYWORDS: Mirrors, Glasses, X-ray optics, Ferroelectric materials, Neodymium, X-rays, Finite element methods, Ions, Grazing incidence, Image resolution

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Proceedings Article | 17 September 2012 Paper

Paper

SMART-X: Square Meter Arcsecond Resolution x-ray Telescope

A. Vikhlinin, P. Reid, H. Tananbaum, D. Schwartz, W. Forman, C. Jones, J. Bookbinder, V. Cotroneo, S. Trolier-McKinstry, D. Burrows, M. Bautz, R. Heilmann, J. Davis, S. Bandler, M. Weisskopf, S. Murray

Proceedings Volume 8443, 844316 (2012) https://doi.org/10.1117/12.926851

KEYWORDS: Mirrors, X-rays, Spectroscopy, Galactic astronomy, Sensors, X-ray telescopes, Stars, X-ray optics, Spatial resolution, Spectral resolution

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Proceedings Article | 8 May 2012 Paper

Paper

Piezoelectronics: a novel, high-performance, low-power computer switching technology

D. Newns, G. Martyna, B. Elmegreen, X.-H. Liu, T. Theis, S. Trolier-McKinstry

Proceedings Volume 8373, 837304 (2012) https://doi.org/10.1117/12.918134

KEYWORDS: Positron emission tomography, Switching, Logic, Clocks, Transistors, Resistance, Switches, Acoustics, Transition metals, Transducers

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Proceedings Article | 12 October 2011 Paper

Paper

Toward active x-ray telescopes

Stephen O'Dell, Carolyn Atkins, Timothy Button, Vincenzo Cotroneo, William Davis, Peter Doel, Charlotte Feldman, Mark Freeman, Mikhail Gubarev, Jeffery Kolodziejczak, Alan Michette, Brian Ramsey, Paul Reid, Daniel Rodriguez Sanmartin, Timo Saha, Daniel Schwartz, Susan Trolier-McKinstry, Rudeger H. Wilke, Richard Willingale, William Zhang

Proceedings Volume 8147, 81471Q (2011) https://doi.org/10.1117/12.896458

KEYWORDS: Mirrors, X-ray telescopes, X-rays, X-ray optics, Actuators, Ferroelectric materials, Glasses, Active optics, Thin films, Prototyping

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Proceedings Article | 7 October 2011 Paper

Paper

Adjustable grazing incidence x-ray optics: measurement of actuator influence functions and comparison with modeling

Vincenzo Cotroneo, William Davis, Paul Reid, Daniel Schwartz, Susan Trolier-McKinstry, Rudeger H. Wilke

Proceedings Volume 8147, 81471R (2011) https://doi.org/10.1117/12.895475

KEYWORDS: Mirrors, Actuators, Glasses, Image quality, Ferroelectric materials, X-ray optics, Prototyping, Spatial resolution, Finite element methods, Thin films

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Proceedings Article | 21 May 2011 Paper

Paper

New materials for uncooled IR imaging: nickel manganite thin films grown by spin spray

Song Won Ko, Jing Li, Myung-Yoon Lee, Elizabeth Dickey, Thomas Jackson, Susan Trollier-McKinstry

Proceedings Volume 8012, 80123S (2011) https://doi.org/10.1117/12.884636

KEYWORDS: Nickel, Copper, Transmission electron microscopy, Spinel, Silicon, Microbolometers, Resistance, Infrared imaging, Thin film growth, Thin films

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Proceedings Article | 22 October 2010 Paper

Paper

High-resolution x-ray telescopes

Stephen O'Dell, Roger Brissenden, William Davis, Ronald Elsner, Martin Elvis, Mark Freeman, Terrance Gaetz, Paul Gorenstein, Mikhail Gubarev, Diab Jerius, Michael Juda, Jeffery Kolodziejczak, Stephen Murray, Robert Petre, William Podgorski, Brian Ramsey, Paul Reid, Timo Saha, Daniel Schwartz, Susan Trolier-McKinstry, Martin Weisskopf, Rudeger H. Wilke, Scott Wolk, William Zhang

Proceedings Volume 7803, 78030H (2010) https://doi.org/10.1117/12.862315

KEYWORDS: X-ray telescopes, X-rays, Mirrors, Observatories, Spatial resolution, X-ray imaging, X-ray astronomy, Telescopes, Space telescopes, Astronomy

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Proceedings Article | 29 September 2010 Paper

Paper

On-orbit adjustment concepts for the Generation-X Observatory

Daniel Schwartz, Roger Brissenden, Mark Freeman, Terrance Gaetz, Paul Gorenstein, Diab Jerius, Michael Juda, Paul Reid, Scott Wolk, Timo Saha, William Zhang, Stephen O'Dell, Susan Trolier-McKinstry, Derek Wilke

Proceedings Volume 7803, 78030J (2010) https://doi.org/10.1117/12.862353

KEYWORDS: Mirrors, X-rays, Diffraction, Observatories, Sensors, Point spread functions, Spatial resolution, X-ray optics, Distortion, Visible radiation

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Proceedings Article | 2 September 2010 Paper

Paper

Technology challenges of active x-ray optics for astronomy

Paul Reid, William Davis, Daniel Schwartz, Susan Trolier-McKinstry, Rudeger H. Wilke

Proceedings Volume 7803, 78030I (2010) https://doi.org/10.1117/12.862502

KEYWORDS: Mirrors, X-ray optics, X-rays, X-ray astronomy, Active optics, Astronomy, Observatories, Glasses, Astronomical imaging, Thin films

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Proceedings Article | 27 August 2010 Paper

Paper

PZT piezoelectric films on glass for Gen-X imaging

Rudeger H. Wilke, Susan Trolier-McKinstry, Paul Reid, Daniel Schwartz

Proceedings Volume 7803, 78030O (2010) https://doi.org/10.1117/12.862233

KEYWORDS: Ferroelectric materials, Glasses, Crystals, Sol-gels, Sputter deposition, Silicon, Semiconducting wafers, Thin films, Electrodes, Perovskite

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The proposed adaptive optics system for the Gen-X telescope uses piezoelectric lead zirconate titanate (PZT) films deposited on flexible glass substrates. The low softening transition of the glass substrates imposes several processing challenges that require the development of new approaches to deposit high quality PZT thin films. Synthesis and optimization of chemical solution deposited 1 μm thick films of PbZr_0.52Ti_0.48O₃ on small area (1 in²) and large area (16 in²) Pt/Ti/glass substrates has been performed. In order to avoid warping of the glass at temperatures typically used to crystallize PZT films (~700°C), a lower temperature, two-step crystallization process was employed. An ~80 nm thick seed layer of PbZr_0.30Ti_0.70O₃ was deposited to promote the growth of the perovskite phase. After the deposition of the seed layer, the films were annealed in a rapid thermal annealing (RTA) furnace at 550°C for 3 minutes to nucleate the perovskite phase. This was followed by isothermal annealing at 550°C for 1 hour to complete crystallization. For the subsequent PbZr_0.52Ti_0.48O₃ layers, the same RTA protocol was performed, with the isothermal crystallization implemented following the deposition of three PbZr_0.52Ti_0.48O₃ spin-coated layers. Over the frequency range of 1 kHz to 100 kHz, films exhibit relative permittivity values near 800 with loss tangents below 0.07. Hysteresis loops show low levels of imprint with coercive fields of 40-50 kV/cm in the forward direction and 50-70 kV/cm in the reverse direction. The remanent polarization varied from 25-35 μC/cm² and e_31,f values were approximately -5.0 C/m². In scaling up the growth procedure to large area films, where warping becomes more pronounced due to the increased size of the substrate, the pyrolysis and crystallization conditions were performed in a box furnace to improve the temperature uniformity. By depositing films on both sides of the glass substrate, the tensile stresses are balanced, providing a sufficiently flat surface to continue PZT deposition. The properties of the large area film are comparable to those obtained on small substrates. While sol-gel processing is a viable approach to the deposition of high quality PZT thin films on glass substrates, preliminary results using RF magnetron sputter deposition demonstrate comparable properties with a significantly simpler process that offers a superior route for large scale production.

Proceedings Article | 31 August 2009 Paper

Paper

Generation-X mirror technology development plan and the development of adjustable x-ray optics

Paul Reid, William Davis, Stephen O'Dell, Daniel Schwartz, Susan Tolier-McKinstry, Rudeger H. Wilke, William Zhang

Proceedings Volume 7437, 74371F (2009) https://doi.org/10.1117/12.830858

KEYWORDS: Mirrors, Ferroelectric materials, X-rays, Crystals, Finite element methods, Glasses, X-ray optics, Grazing incidence, Thin films, X-ray imaging

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Proceedings Article | 15 July 2008 Paper

Paper

Development of adjustable grazing incidence optics for Generation-X

Paul Reid, Stephen Murray, Susan Trolier-McKinstry, Mark Freeman, Michael Juda, William Podgorski, Brian Ramsey, Daniel Schwartz

Proceedings Volume 7011, 70110V (2008) https://doi.org/10.1117/12.789371

KEYWORDS: Mirrors, Actuators, Grazing incidence, X-ray telescopes, Telescopes, Electrodes, X-ray optics, X-rays, Ferroelectric materials, Space telescopes

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Proceedings Article | 20 January 2003 Paper

Paper

Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Eui-Hyeok Yang, Kirill Shcheglov, Susan Trolier-McKinstry

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.473715

KEYWORDS: Actuators, Deformable mirrors, Silicon, Mirrors, Ferroelectric materials, Semiconducting wafers, Fabrication, Space telescopes, Indium, Microelectromechanical systems

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Proceedings Article | 2 October 2001 Paper

Paper

Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication processes

Steven Gross, Qingqi Zhang, Srinivas Tadigadapa, Susan Trolier-McKinstry, Thomas Jackson, Frank Djuth

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442988

KEYWORDS: Etching, Ferroelectric materials, Silicon, Microelectromechanical systems, Platinum, Zirconium dioxide, Ion beams, Dielectric polarization, Wet etching, Ions

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Proceedings Article | 1 October 2001 Paper

Paper

Fabrication and performance of d33-mode lead-zirconate-titanate (PZT) MEMS accelerometers

Han Yu, Richard Wolf, Kan Deng, Lichun Zou, Srinivas Tadigadapa, Susan Troilier-McKinstry

Proceedings Volume 4559, (2001) https://doi.org/10.1117/12.443027

KEYWORDS: Ferroelectric materials, Electrodes, Capacitors, Microelectromechanical systems, Deep reactive ion etching, Etching, Semiconducting wafers, Thin films, Silicon, Sensors

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Proceedings Article | 22 December 1998 Paper

Paper

Step-flow growth of perovskite PbTiO3 thin films epitaxially grown on a miscut SrTiO3 substrate

Kiyotaka Wasa, Yoko Haneda, Toshifumi Sato, Hideaki Adachi, Isaku Kanno, Darrell Schlom, Susan Trolier-McKinstry, Qing Gang, Chang-Beom Eom

Proceedings Volume 3481, (1998) https://doi.org/10.1117/12.335874

KEYWORDS: Thin films, Crystals, Sputter deposition, Oxygen, Thin film growth, Transmission electron microscopy, Crystallography, Distortion, Scanning electron microscopy, Perovskite

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Showing 5 of 44 publications

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