The long-term objective of our research is to develop sensor systems for detection of gear failure signs. As a very first step, this paper proposes a new method to create sensors directly printed on gears by a printer and conductive ink, and shows the printing system configuration and the procedure of sensor development. The developing printer system is a laser sintering system consisting of a laser and CNC machinery. The laser is able to synthesize micro conductive patterns, and introduced to the CNC machinery as a tool. In order to synthesize sensors on gears, we first design the micro-circuit pattern on a gear through the use of 3D-CAD, and create a program (G-code) for the CNC machinery by CAM. This paper shows initial experiments with the laser sintering process in order to obtain the optimal parameters for the laser setting. This new method proposed here may provide a new manufacturing process for mechanical parts, which have an additional functionality to detect failure, and possible improvements include creating more economical and sustainable systems.
We have selected Cr and C as a material pair of multilayer (ML) mirrors for soft x rays at the wavelength near 5 nm. The Cr-C ML structures have successfully been fabricated with rf- magnetron sputtering. The ML structures have been characterized with transmission electron microscopy (TEM), x-ray diffraction, and reflectivity measurement by SR light. From the observation of TEM images, Cr-C MLs had uniform and less-defective layered structures with the d-spacing down to 2.4 nm. Reflectivities at normal and grazing incidence were remarkably decreased with decreasing the ML d-spacing. Normal incidence reflectivity at 5 nm was as high as 7%. The regularity of the d-spacing of the MLs was evaluated with a moire image that was formed by putting a reference stripe pattern on the cross-sectional TEM micrograph. Compared to Ni-C MLs, Cr-C is a preferable material combination for x-ray mirrors for shorter wavelength and normal incidence.
We have successfully demonstrated double pass enhancement of amplified spontaneous emission of soft x rays, 23.2 and 23.6 nm of 3p - 3s transitions in Ne-like Ge, using an x-ray multilayer mirror. In this paper, we report on the fabrication of the mirror and analysis of its damage suffered during the experiments. The mirror used was a Mo-Si multilayer mirror with the reflectivity of 35% at the wavelength of 23.6 nm, deposited by an rf-sputtering system. In the damaged area of the mirror, only the multilayer was locally evaporated and the bare substrate underneath appeared. The size of the damaged area corresponded to the aperture size. We carried out the simulation on the spatial and temporal distribution of the mirror temperature during the experiment. Assuming that thermal x rays enter the mirror with the largest amount of energy among all the fluxes at the early stage of the enhancement, the result of the simulation can explain the damage feature and the temporal profile of the intensity of the amplified spontaneous emissions.
We have previously reported that columnar-structures were formed in electron beam (EB) deposited and DCmagnetron
sputtered Mo-Si layered synthetic microstructures (LSMs). The columnar structures reduced x-ray reflectivity
by roughing layer interfaces of the LSMs. We here investigated the conditions to suppress columnar structure
formation, by varying the substrate temperature (T9) in EB deposition and the argon pressure (PAT ) in D C- and
RF-sputtering. In the EB deposited LSMs, the columnar structure disappeared and almost uniform LSMs were obtamed
both at T□ 400°C and T9< -155°C. In the DC- and RF-sputtered LSMs, the columnar structure formation
was suppressed by lowering PAr. The measured x-ray reflectivity of the LSMs increased according to the suppression
of the columnar structure formation.
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