Dr. Taisuke Miura Profile

Dr. Taisuke Miura

Chief Research Manager at Gigaphoton Inc

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Author

Websites:

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Publications (39)

Proceedings Article | 2 March 2020 Paper

Paper

High peak power DUV laser processing

Yasuhiro Kamba, Hironori Igarashi, Takashi Onose, Taisuke Miura, Ryoichi Nohdomi, Hiroaki Oizumi, Yoshihiko Murakami, Atsushi Fuchimukai, Chen Qu, Yuki Tamaru, Yohei Tanaka, Yuujirou Sasaki, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 11273, 112730L (2020) https://doi.org/10.1117/12.2549826

KEYWORDS: Excimer lasers, Deep ultraviolet, Laser processing, Pulsed laser operation, Picosecond phenomena, Laser drilling, Semiconductors, Lithography, Fiber lasers, Light sources

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Proceedings Article | 15 February 2018 Presentation + Paper

Presentation + Paper

Improvement of conversion efficiency of DUV light generation at 221-nm using CLBO crystal

Hironori Igarashi, Zhigang Zhao, Hongwen Xuan, Chen Qu, Shinji Ito, Yuki Tamaru, Mitsuru Tamiya, Taisuke Miura, Junichi Fujimoto, Hakaru Mizoguchi, Yohei Kobayashi

Proceedings Volume 10516, 1051602 (2018) https://doi.org/10.1117/12.2287675

KEYWORDS: Deep ultraviolet, Fiber lasers, Crystals, Semiconductor lasers, Excimer lasers, Nonlinear crystals, Solid state lasers, Near infrared, Ytterbium, Light sources

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Proceedings Article | 11 May 2017 Presentation + Paper

Presentation + Paper

Investigation and modelling of pump saturation effect on thermal load of Yb:YAG thin disk pumped at various wavelengths

P. Severová, M. Chyla, J. Mužík, M. Smrž, T. Miura, M. Kawasaki, T. Higashiguchi, A. Endo, T. Mocek

Proceedings Volume 10238, 102380P (2017) https://doi.org/10.1117/12.2265822

KEYWORDS: Luminescence, Head, Optical simulations, Solids, Quantum efficiency, Stars, Absorption, Thermal effects, Diodes, Temperature metrology

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Proceedings Article | 27 April 2016 Paper

Paper

Picosecond pulses in deep ultraviolet (257.5 nm and 206 nm) and mid-IR produced by a high-power 100 kHz solid-state thin-disk laser

Hana Turčičová, Ondřej Novák, Martin Smrž, Taisuke Miura, Akira Endo, Tomáš Mocek

Proceedings Volume 9893, 989302 (2016) https://doi.org/10.1117/12.2227124

KEYWORDS: Nonlinear crystals, Crystals, Laser crystals, Picosecond phenomena, Deep ultraviolet, Laser processing, Sum-frequency generation, High power lasers, Solid state lasers, Crystals, Picosecond phenomena, Nonlinear crystals, Mid-IR, Diodes, Laser crystals, Mirrors, Photons, Optical amplifiers

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Proceedings Article | 27 April 2016 Paper

Paper

Development of a kW-level picosecond thin-disk regenerative amplifier with a ring cavity

J. Mužik, M. Smrž, O. Novák, T. Miura, A. Endo, V. Kubeček, T. Mocek

Proceedings Volume 9893, 989307 (2016) https://doi.org/10.1117/12.2227714

KEYWORDS: Optical amplifiers, Picosecond phenomena, Laser development, Laser systems engineering, Pulsed laser operation, Laser crystals, Laser systems engineering, Semiconductor lasers, Mirrors, Fiber Bragg gratings

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Proceedings Article | 27 April 2016 Paper

Paper

Cryogenically-cooled Yb:YGAG ceramic picosecond oscillator

J. Mužik, M. Jelínek, T. Miura, M. Smrž, A. Endo, T. Mocek, V. Kubeček

Proceedings Volume 9893, 98930B (2016) https://doi.org/10.1117/12.2227437

KEYWORDS: Ceramics, Picosecond phenomena, Oscillators, Cryogenics, Ceramics, Picosecond phenomena, Oscillators, Mode locking, Laser crystals, Cryogenics, Mirrors, Pulsed laser operation, Continuous wave operation, Output couplers, Ocean optics

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Proceedings Article | 16 March 2016 Paper

Paper

Progress in kW-class picosecond thin-disk lasers development at the HiLASE

Martin Smrž, Jiří Mužík, Ondřej Novák, Michal Chyla, Hana Turčičová, Siva Nagisetty, Jaroslav Huynh, Taisuke Miura, Jens Linnemann, Patricie Severová, Pawel Sikocinski, Akira Endo, Tomáš Mocek

Proceedings Volume 9726, 972617 (2016) https://doi.org/10.1117/12.2212396

KEYWORDS: Picosecond phenomena, Amplifiers, Pulsed laser operation, Laser development, Sum-frequency generation, Fiber Bragg gratings, Phonons, Mid-IR, Laser applications, Optical amplifiers, Fiber amplifiers, Crystals

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Proceedings Article | 18 May 2015 Paper

Paper

Continuous-wave seeded mid-IR parametric system pumped by the high-average-power picosecond Yb:YAG thin-disk laser

Ondřej Novák, Martin Smrž, Taisuke Miura, Hana Turčičová, Akira Endo, Tomáš Mocek

Proceedings Volume 9503, 95030W (2015) https://doi.org/10.1117/12.2178747

KEYWORDS: Crystals, Ferroelectric materials, Mid-IR, Nonlinear crystals, Optical amplifiers, Picosecond phenomena, Laser crystals, Continuous wave operation, Semiconductor lasers, Absorption

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Proceedings Article | 12 May 2015 Paper

Paper

Timing jitter measurement and stabilization of a mode-locked ytterbium fiber laser

Jakub Měsíček, Jens Linnemann, Martin Smrž, Taisuke Miura, Akira Endo, Tomáš Mocek

Proceedings Volume 9513, 95130B (2015) https://doi.org/10.1117/12.2179043

KEYWORDS: Fiber lasers, Oscillators, Phase measurement, Picosecond phenomena, Mode locking, Pulsed laser operation, Actuators, Turbulence, Ytterbium, Signal detection

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Proceedings Article | 12 May 2015 Paper

Paper

Amplification of picosecond pulses to 100 W by an Yb:YAG thin-disk with CVBG compressor

Martin Smrž, Michal Chyla, Ondřej Novák, Taisuke Miura, Akira Endo, Tomáš Mocek

Proceedings Volume 9513, 951304 (2015) https://doi.org/10.1117/12.2178900

KEYWORDS: Picosecond phenomena, Fiber Bragg gratings, Amplifiers, Pulsed laser operation, Optical amplifiers, Laser applications, Phonons, High power lasers, Laser systems engineering, Oscillators

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Proceedings Article | 12 May 2015 Paper

Paper

Picosesond pulses in deep ultraviolet produced by a 100 kHz solid-state thin disk laser

H. Turčičová, O. Novák, M. Smrž, T. Miura, A. Endo, T. Mocek

Proceedings Volume 9513, 95130V (2015) https://doi.org/10.1117/12.2178491

KEYWORDS: Crystals, Picosecond phenomena, Deep ultraviolet, Disk lasers, Laser crystals, Harmonic generation, Nonlinear crystals, Solid state lasers, Solid state physics, Oscillators

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Proceedings Article | 26 March 2015 Paper

Paper

Development of a closed-loop cryogenically cooled sub-picosecond regenerative amplifier

P. Sikocinski, T. Miura, Venkatesan Jambunathan, Jens Linnemann, A. Endo, H. Jelinkova, T. Mocek

Proceedings Volume 9342, 93421Z (2015) https://doi.org/10.1117/12.2079447

KEYWORDS: Picosecond phenomena, Laser beam diagnostics, Optical amplifiers, Crystals, Laser systems engineering, Fiber lasers, Fiber amplifiers, Cryogenics, Amplifiers, Temperature metrology

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Proceedings Article | 3 March 2015 Paper

Paper

Time-resolved deformation measurement of Yb:YAG thin disk using wavefront sensor

Michal Chyla, Shiva Nagisetty, Patricie Severová, Taisuke Miura, Klaus Mann, Akira Endo, Tomas Mocek

Proceedings Volume 9343, 93431E (2015) https://doi.org/10.1117/12.2079326

KEYWORDS: Wavefront sensors, Wavefronts, Mirrors, Laser beam diagnostics, Pulsed laser operation, Monochromatic aberrations, Silver, Optical testing, Diodes, Picosecond phenomena

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Proceedings Article | 3 March 2015 Paper

Paper

Single shot M2 measurement for near infrared high energy laser pulses

Siva Nagisetty, Taisuke Miura, Martin Smrz, Vaclav Kubecek, Akira Endo, Tomáš Mocek

Proceedings Volume 9343, 93431F (2015) https://doi.org/10.1117/12.2079669

KEYWORDS: Cameras, Laser beam propagation, Glasses, Optical testing, Pulsed laser operation, Time metrology, Luminescence, Imaging systems, Laser induced fluorescence, Zoom lenses

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Proceedings Article | 20 February 2015 Paper

Paper

Wavelength tunability of laser based on Yb-doped YGAG ceramics

Jan Šulc, Helena Jelínková, Venkatesan Jambunathan, Taisuke Miura, Akira Endo, Antonio Lucianetti, Tomáš Mocek

Proceedings Volume 9342, 93421T (2015) https://doi.org/10.1117/12.2077494

KEYWORDS: Semiconductor lasers, Ceramics, Laser resonators, Diodes, Output couplers, Reflectivity, Optical filters, Absorption, Tunable lasers, Mirrors

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Proceedings Article | 3 February 2015 Paper

Paper

HiLASE: development of fully diode pumped disk lasers with high average power

M. Divoky, M. Smrz, M. Chyla, P. Sikocinski, P. Severova, O. Novák, J. Huynh, S. S. Nagisetty, T. Miura, C. Liberatore, J. Pilař, O. Slezak, M. Sawicka, V. Jambunathan, L. Gemini, J. Vanda, R. Svabek, A. Endo, A. Lucianetti, D. Rostohar, P. Mason, P. J. Phillips, K. Ertel, S. Banerjee, C. Hernandez-Gomez, J. Collier, T. Mocek

Proceedings Volume 9255, 92550V (2015) https://doi.org/10.1117/12.2064420

KEYWORDS: Amplifiers, Optical amplifiers, Picosecond phenomena, Laser systems engineering, Head, Diodes, Pulsed laser operation, Laser applications, Oscillators, Laser development

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Proceedings Article | 7 January 2015 Paper

Paper

Precise curvature measurement of Yb:YAG thin disk

Jiri Muzik, Michal Chyla, Siva Nagisetty, Taisuke Miura, Klaus Mann, Akira Endo, Tomas Mocek

Proceedings Volume 9442, 94420X (2015) https://doi.org/10.1117/12.2176185

KEYWORDS: Mirrors, Wavefronts, Picosecond phenomena, Imaging systems, Optical amplifiers, Laser beam diagnostics, Semiconductor lasers, Sensors, Extreme ultraviolet, Laser development

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Proceedings Article | 12 May 2014 Paper

Paper

Tunable mid-IR parametric conversion system pumped by a high-average-power picosecond Yb:YAG thin-disk laser

Ondřej Novák, Taisuke Miura, Martin Smrž, Jaroslav Huynh, Patricie Severová, Akira Endo, Tomáš Mocek

Proceedings Volume 9135, 91350I (2014) https://doi.org/10.1117/12.2052199

KEYWORDS: Picosecond phenomena, Crystals, Nonlinear crystals, Optical amplifiers, Mid-IR, Ferroelectric materials, Semiconductor lasers, Continuous wave operation, Laser crystals, Tunable lasers

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Proceedings Article | 28 February 2014 Paper

Paper

Zero-phonon-line pumped 100-kHz Yb:YAG thin disk regenerative amplifier

Taisuke Miura, Martin Smrž, Siva Sankar Nagisetty, Ondřej Novák, Michal Chyla, Patricie Severová, Akira Endo, Tomáš Mocek

Proceedings Volume 8959, 895923 (2014) https://doi.org/10.1117/12.2040227

KEYWORDS: Amplifiers, Picosecond phenomena, Pulsed laser operation, Diodes, Carbon dioxide lasers, Extreme ultraviolet, Tin, Laser applications, Crystals, Solid state lasers

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Proceedings Article | 28 February 2014 Paper

Paper

50-mJ, 1-kHz Yb:YAG thin-disk regenerative amplifier with 969-nm pulsed pumping

Michal Chyla, Taisuke Miura, Martin Smrž, Patricie Severova, Ondrej Novak, Akira Endo, Tomas Mocek

Proceedings Volume 8959, 89590S (2014) https://doi.org/10.1117/12.2039736

KEYWORDS: Optical amplifiers, Picosecond phenomena, Pulsed laser operation, Semiconductor lasers, Amplifiers, Laser applications, Extreme ultraviolet, Plasma, Fiber amplifiers, Optical testing

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Proceedings Article | 28 February 2014 Paper

Paper

High-energy picosecond light source based on cryogenically conduction cooled Yb-doped laser amplifier

P. Sikocinski, T. Miura, J. Venkatesan, M. Chyla, P. Severová, A. Endo, T. Mocek

Proceedings Volume 8959, 89590P (2014) https://doi.org/10.1117/12.2037764

KEYWORDS: Picosecond phenomena, Amplifiers, Optical amplifiers, Crystals, Laser systems engineering, Laser beam diagnostics, Fiber amplifiers, Laser applications, Pulsed laser operation, Laser metrology

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Proceedings Article | 17 May 2013 Paper

Paper

Modeling and optimization of thin disk structure for high power sub-joule laser

Patricie Severová, Martin Smrz, Michal Chyla, Taisuke Miura, Akira Endo, Tomáš Mocek

Proceedings Volume 8780, 87800W (2013) https://doi.org/10.1117/12.2017388

KEYWORDS: Finite element methods, Thermal modeling, 3D modeling, High power lasers, YAG lasers, Convection, Optimization (mathematics), Thermal effects, Analytical research

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Proceedings Article | 7 May 2013 Paper

Paper

High-power, picosecond pulse thin-disk lasers in the Hilase project

Michal Chyla, Taisuke Miura, Martin Smrz, Patricie Severova, Ondrej Novak, Siva Nagisetty, Akira Endo, Tomas Mocek

Proceedings Volume 8780, 87800A (2013) https://doi.org/10.1117/12.2017448

KEYWORDS: Optical amplifiers, Picosecond phenomena, Pulsed laser operation, Fiber amplifiers, Prototyping, Oscillators, High power lasers, Diodes, Amplifiers, Lasers

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Proceedings Article | 7 May 2013 Paper

Paper

Design of a tunable parametric wavelength conversion system between 2 and 3 um pumped by a high-average-power Yb:YAG thin-disk laser

Ondřej Novák, Taisuke Miura, Patricie Severová, Akira Endo, Tomáš Mocek

Proceedings Volume 8780, 87800P (2013) https://doi.org/10.1117/12.2017289

KEYWORDS: Crystals, Optical amplifiers, Picosecond phenomena, Laser damage threshold, Nonlinear crystals, Laser crystals, Absorption, Dispersion, Refractive index, Tunable lasers

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Proceedings Article | 7 May 2013 Paper

Paper

Simple measurement of picosecond laser pulses in a wavelength range above 1um

Martin Smrz, Taisuke Miura, Petr Straka, Akira Endo, Tomás Mocek

Proceedings Volume 8780, 878013 (2013) https://doi.org/10.1117/12.2017524

KEYWORDS: Picosecond phenomena, Pulsed laser operation, Diffraction gratings, Second-harmonic generation, Signal detection, Mirrors, Mid-IR, Phase measurement, Ultrafast phenomena, Crystals

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Proceedings Article | 26 March 2013 Paper

Paper

Zero-phonon-line pumped 1 kHz Yb:YAG thin-disk regenerative amplifier

Michal Chyla, Taisuke Miura, Martin Smrz, Patricie Severova, Ondrej Novak, Akira Endo, Tomas Mocek

Proceedings Volume 8599, 85991Q (2013) https://doi.org/10.1117/12.2004535

KEYWORDS: Optical amplifiers, Picosecond phenomena, Continuous wave operation, Prototyping, Pulsed laser operation, Semiconductor lasers, Diffraction, Fiber amplifiers, Energy efficiency, Oscillators

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Proceedings Article | 26 February 2013 Paper

Paper

In-situ optical phase distortion measurement of Yb:YAG thin disk in high average power regenerative amplifier

Taisuke Miura, Michal Chyla, Martin Smrž, Siva Sankar Nagisetty, Patricie Severová, Ondřej Novák, Akira Endo, Tomáš Mocek

Proceedings Volume 8603, 860303 (2013) https://doi.org/10.1117/12.2004496

KEYWORDS: Optical amplifiers, Wavefront sensors, Laser beam diagnostics, Picosecond phenomena, Phase measurement, Spherical lenses, Fiber amplifiers, Interferometry, Pulsed laser operation, Wavefronts

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Proceedings Article | 25 February 2009 Paper

Paper

High-energy and high-power Yb:KGW femtosecond regenerative amplifier

Taisuke Miura, Shinji Ito

Proceedings Volume 7203, 72030U (2009) https://doi.org/10.1117/12.808594

KEYWORDS: Crystals, Mode locking, Optical amplifiers, Femtosecond phenomena, Amplifiers, Pulsed laser operation, Laser crystals, Semiconductor lasers, Diodes, Mirrors

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Proceedings Article | 21 March 2007 Paper

Paper

Characterization of various Sn targets with respect to debris and fast ion generation

Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga, Taisuke Miura, Masaki Nakano, Hiroshi Komori, Georg Soumagne, Akira Endo, Hakaru Mizoguchi, Akira Sumitani, Koichi Toyoda

Proceedings Volume 6517, 65173B (2007) https://doi.org/10.1117/12.711226

KEYWORDS: Tin, Gas lasers, Ions, Plasma, Carbon monoxide, Nd:YAG lasers, Extreme ultraviolet, Glasses, Solids, Mirrors

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Proceedings Article | 24 March 2006 Paper

Paper

High-power pulsed CO₂ laser for EUV lithography

Tatsuya Ariga, Hideo Hoshino, Taisuke Miura, Akira Endo

Proceedings Volume 6151, 61513M (2006) https://doi.org/10.1117/12.656804

KEYWORDS: Gas lasers, Pulsed laser operation, Carbon monoxide, Laser systems engineering, Extreme ultraviolet, Xenon, Plasma, Optical amplifiers, Oscillators, Amplifiers

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Proceedings Article | 23 March 2006 Paper

Paper

Development of CO₂ laser produced Xe plasma EUV light source for microlithography

Hakaru Mizoguchi, Akira Endo, Tatsuya Ariga, Taisuke Miura, Hideo Hoshino, Yoshifumi Ueno, Masaki Nakano, Hiroshi Komori, Akira Sumitani, Tamotsu Abe, Takashi Suganuma, Georg Soumagne, Hiroshi Someya, Yuichi Takabayashi, Koichi Toyoda

Proceedings Volume 6151, 61510S (2006) https://doi.org/10.1117/12.656941

KEYWORDS: Gas lasers, Carbon monoxide, Plasma, Pulsed laser operation, Xenon, Extreme ultraviolet, Ions, Magnetism, Laser irradiation, Oscillators

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Proceedings Article | 23 February 2006 Paper

Paper

A 100-kHz thin disk Yb:YAG regenerative amplifier

Taisuke Miura, Akira Endo

Proceedings Volume 6101, 61011R (2006) https://doi.org/10.1117/12.645775

KEYWORDS: Birefringence, Extreme ultraviolet, Crystals, Optical amplifiers, Continuous wave operation, Polarization, Mirrors, Laser resonators, High power lasers

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Proceedings Article | 23 February 2006 Paper

Paper

High power and short pulse RF-excited CO₂ laser MOPA system for LLP EUV light source

Tatsuya Ariga, Hideo Hoshino, Taisuke Miura, Akira Endo

Proceedings Volume 6101, 61011N (2006) https://doi.org/10.1117/12.645607

KEYWORDS: Gas lasers, Pulsed laser operation, Carbon monoxide, Extreme ultraviolet, Laser systems engineering, Optical amplifiers, Xenon, Plasma, Oscillators, Continuous wave operation

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Proceedings Article | 31 August 2005 Paper

Paper

Development of short pulse and high power CO2 laser for EUV lithography

Akira Endo, Hideo Hoshino, Tatsuya Ariga, Taisuke Miura

Proceedings Volume 5918, 59180I (2005) https://doi.org/10.1117/12.616342

KEYWORDS: Carbon dioxide lasers, Pulsed laser operation, Extreme ultraviolet, Optical amplifiers, Xenon, Plasma, Laser systems engineering, Oscillators, Continuous wave operation, Gas lasers

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Proceedings Article | 27 April 2005 Paper

Paper

High-average power pulsed Yb:YAG thin-disk laser

Taisuke Miura, Takashi Suganuma, Akira Endo, Satoshi Wada

Proceedings Volume 5707, (2005) https://doi.org/10.1117/12.590206

KEYWORDS: Birefringence, Crystals, Continuous wave operation, Polarization, Laser development, Mirrors, Laser resonators, Pulsed laser operation, High power lasers, Electrodes

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Proceedings Article | 28 December 2001 Paper

Paper

Optically phase-locked femtosecond laser oscillator for precise synchronization with femtosecond x-ray beams

Akira Endo, Hideyuki Nagaoka, Taisuke Miura, Kazuya Takasago, Kenji Torizuka

Proceedings Volume 4500, (2001) https://doi.org/10.1117/12.452972

KEYWORDS: Femtosecond phenomena, Signal detection, X-rays, Mode locking, Oscillators, Pulsed laser operation, Laser systems engineering, Laser stabilization, Sapphire lasers, Laser scattering

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Proceedings Article | 4 June 1999 Paper

Paper

Sub-100-fs timing jitter of mode-locked laser

Katsuyuki Kobayashi, Taisuke Miura, Zhigang Zhang, Kenji Torizuka

Proceedings Volume 3616, (1999) https://doi.org/10.1117/12.351832

KEYWORDS: Mode locking, Ferroelectric materials, Pulsed laser operation, Mirrors, Oscillators, Femtosecond phenomena, Spectrum analysis, Photodiodes, Laser stabilization, X-rays

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Proceedings Article | 4 June 1999 Paper

Paper

Measurement of the timing jitter in a kilohertz regenerative amplifier system

Taisuke Miura, Katsuyuki Kobayashi, Zhigang Zhang, Kenji Torizuka, Fumihiko Kannari

Proceedings Volume 3616, (1999) https://doi.org/10.1117/12.351833

KEYWORDS: Oscillators, Picosecond phenomena, Upconversion, Amplifiers, Femtosecond phenomena, Optical amplifiers, X-rays, Mode locking, Pulsed laser operation, Fourier transforms

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Proceedings Article | 13 May 1998 Paper

Paper

Cavity-mode analysis of a Kerr-lens mode-locked laser with a novel five-mirror cavity

Taisuke Miura, Katsuyuki Kobayashi, Zhigang Zhang, Kenji Torizuka, Fumihiko Kannari

Proceedings Volume 3267, (1998) https://doi.org/10.1117/12.308117

KEYWORDS: Mode locking, Mirrors, Continuous wave operation, Laser crystals, Laser resonators, Laser applications, Semiconductors, Crystals, Gaussian beams, Optical alignment

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Showing 5 of 39 publications

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