Mr. Takayuki Takano Profile

Takayuki Takano

at AIST

SPIE Involvement:

Author

Publications (9)

SPIE Journal Paper | 1 July 2009

Demonstration of fabricating a needle array by the combination of x-ray grayscale mask with the lithografie, galvanoformung, abformung process

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

JM3, Vol. 8, Issue 03, 033010, (July 2009) https://doi.org/10.1117/12.10.1117/1.3158617

KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, Scanning electron microscopy, X-ray technology, Nickel, X-ray imaging, Self-assembled monolayers

Read Abstract +

Proceedings Article | 24 July 2008 Paper

Design and fabrication of TES microcalorimeters for x-ray astrophysics in Japan

Hiroshi Yoshitake, Takaya Ohashi, Yoshitaka Ishisaki, Yuichiro Ezoe, Noriko Yamasaki, Ryutaro Maeda, Kazuhisa Mitsuda, Kazuma Mukai, Hiroki Akamatsu, Takayuki Takano, Tomotaka Yoshino, Kumi Ishikawa

Proceedings Volume 7021, 70211X (2008) https://doi.org/10.1117/12.788155

KEYWORDS: Gold, Silicon, X-rays, Etching, Deep reactive ion etching, X-ray astronomy, Semiconducting wafers, Sensors, X-ray technology, Photoresist materials

Read Abstract +

Proceedings Article | 9 January 2008 Paper

A novel fabrication method of needle array combined x-ray gray mask with LIGA process

Masaharu Takahashi, Koichi Awazu, Ryutaro Maeda, Harutaka Mekaru, Takayuki Takano

Proceedings Volume 6800, 68001R (2008) https://doi.org/10.1117/12.753858

KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, X-ray technology, Nickel, Scanning electron microscopy, Photoresist processing, Etching

Read Abstract +

Proceedings Article | 9 January 2008 Paper

Measurements of silicon dry-etching rates and profiles in MEMS foundries and their application to MEMS design software

R. Maeda, T. Takano, T. Ikehara

Proceedings Volume 6800, 68001X (2008) https://doi.org/10.1117/12.759374

KEYWORDS: Etching, Photomasks, Silicon, Microelectromechanical systems, Deep reactive ion etching, Semiconducting wafers, Photoresist materials, Oxides, Databases, Plasma

Read Abstract +

SPIE Journal Paper | 1 January 2008

Fabrication and evaluation of a grayscale mask for x-ray lithography using MEMS technology

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

JM3, Vol. 7, Issue 01, 013009, (January 2008) https://doi.org/10.1117/12.10.1117/1.2894817

Read Abstract +

Proceedings Article | 3 October 2007 Paper

The first light of a single-stage MEMS x-ray optic

Masaki Suzuki, Kazuhisa Mitsuda, Yoshitomo Maeda, Yuichiro Ezoe, Masaki Koshiishi, Takayuki Takano, Yoshitaka Ishisaki, Ryutaro Maeda, Akio Hoshino, Makoto Mita, Takeyuki Osawa

Proceedings Volume 6688, 668814 (2007) https://doi.org/10.1117/12.733912

KEYWORDS: X-ray optics, Mirrors, X-rays, Silicon, Wafer-level optics, Microelectromechanical systems, Semiconducting wafers, Etching, Reflectivity, Reflection

Read Abstract +

Proceedings Article | 21 March 2007 Paper

Three-dimensional X-ray lithography using a silicon mask with inclined absorbers

Masaharu Takahashi, Harutaka Mekaru, Koichi Awazu, Ryutaro Maeda, Takayuki Takano

Proceedings Volume 6517, 651735 (2007) https://doi.org/10.1117/12.711824

KEYWORDS: X-rays, X-ray lithography, Photomasks, Silicon, Polymethylmethacrylate, Scanning electron microscopy, X-ray technology, Etching, Microelectromechanical systems, X-ray imaging

Read Abstract +

Proceedings Article | 13 June 2006 Paper

Recent development of micropore optics using MEMS technologies

Masaki Koshiishi, Akio Hoshino, Kazuhisa Mitsuda, Zhen Yang, Yoshitaka Ishisaki, Yuichiro Ezoe, Harutaka Mekaru, Ryutaro Maeda, Makoto Mita, Takayuki Takano

Proceedings Volume 6266, 62661B (2006) https://doi.org/10.1117/12.670736

KEYWORDS: Silicon, Semiconducting wafers, Etching, Microelectromechanical systems, X-rays, X-ray optics, Wafer-level optics, Mirrors, Optics manufacturing, Oxides

Read Abstract +

Proceedings Article | 19 January 2006 Paper

Conception and design of a thermal valveless micropump

H. Goto, G. Manzoni, C. Kocer, S. Heisig, R. Maeda, T. Mihara, T. Takano

Proceedings Volume 6036, 60360I (2006) https://doi.org/10.1117/12.638467

KEYWORDS: Microfluidics, Diodes, Terbium, Differential equations, Thermal modeling, Semiconducting wafers, 3D modeling, Fluid dynamics, Antimony, Calibration

Read Abstract +

Showing 5 of 9 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years