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Tieqiao Zheng
at Tsinghua Univ
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Publications (1)
Proceedings Article | 12 December 2018 Paper
Effects of fabrication errors on MTF and diffraction efficiency for binary optical lens
Proceedings Volume 10847, 108470X (2018) https://doi.org/10.1117/12.2505638
KEYWORDS: Diffraction, Modulation transfer functions, Etching, Optical transfer functions, Photomasks, Optical alignment, Error analysis, Quantization
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