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Dr. Viktor Kalugin
at National Research University of Electronic Technology
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Publications (1)
Proceedings Article | 15 March 2019 Paper
ANSYS simulation of the microaccelerometer sensor
S. Timoshenkov, V. Kalugin, S. Anchutin, E. Kochurina
Proceedings Volume 11022, 110220S (2019) https://doi.org/10.1117/12.2521783
KEYWORDS: Etching, Sensors, Chemical elements, Electrodes, Finite element methods, Silicon, Control systems, Plasma, Manufacturing, Microelectromechanical systems
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