Mr. Won-Jae Jang Profile

Won-Jae Jang

at ASML Korea Co Ltd

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 20 March 2020 Presentation + Paper

Taking the multi-wavelength DBO to the next level of accuracy and robustness

Jinsun Kim, Jeongijn Lee, Chan Hwang, Seung Yoon Lee, Wooyoung Jung, Joonsoo Park, Kaustuve Bhattacharyya, Arie den Boef, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Daniel Park, Kaustubh Padhye, Se-Ra Jeon, Seung-Bin Yang, Won-Jae Jang, Oh-Sung Kwon

Proceedings Volume 11325, 113251J (2020) https://doi.org/10.1117/12.2551676

KEYWORDS: Overlay metrology, Semiconducting wafers, Calibration, Metrology, Diffraction gratings, Polarization, Optical testing, Etching, Electronics, Optical lithography

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Proceedings Article | 26 March 2019 Paper

YieldStar uDBO overlay metrology in Samsung D1y DRAM volume production

Jang-Sun Kim, Jin-Moo Byun, Remco Lancee, Jong-Hyun Hwang, Hyeon-Jun Ha, Kwang-Young Hu, Se-Ra Jeon, Won-Jae Jang, Hyung-Sub Son, Vidar van der Meijden, Marc Noot, Bartosz Foltynski, Lukasz Macht, Grzegorz Grzela, Cedric Grouwstra

Proceedings Volume 10959, 109592M (2019) https://doi.org/10.1117/12.2514931

KEYWORDS: Overlay metrology, Metrology, Front end of line, Yield improvement, Control systems, Scatterometry

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Proceedings Article | 16 February 2017 Presentation + Paper

Surface plasmon resonance sensor using vari-focal liquid lens under angular interrogation

Muyoung Lee, Yousung Bang, Jooho Lee, Wonjae Jang, Yong Hyub Won

Proceedings Volume 10106, 101061A (2017) https://doi.org/10.1117/12.2251686

KEYWORDS: Refractive index, Surface plasmons, Sensors, Liquid lenses, Liquids, Metals, Waveguides, Dielectrics, Interfaces, Modulation

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Proceedings Article | 22 April 2016 Presentation + Paper

Cross slit-grooves grid structure for surface plasmon resonant sensor

Jooho Lee, Bikash Nakarmi, Bongho Kim, Wonjae Jang, Yousung Bang, Muyoung Lee, Y. Won

Proceedings Volume 9721, 97210O (2016) https://doi.org/10.1117/12.2212009

KEYWORDS: Surface plasmons, Nanostructures, Sensors, Transmittance, Chemical analysis, Metals, Biosensing, Refractive index, Glucose, Light sources

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Proceedings Article | 14 March 2016 Paper

Lens array fabrication method with volume expansion property of PDMS

WonJae Jang, Junoh Kim, Muyoung Lee, Jooho Lee, Yousung Bang, Yong Hyub Won

Proceedings Volume 9759, 97591F (2016) https://doi.org/10.1117/12.2212023

KEYWORDS: Photoresist materials, Optical lithography, Coating, Glasses, Oxygen, Plasma, Photoresist developing, Manufacturing, Metals, Photomasks, Lithography, Microlens array

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