Mr. Wonsuk Ahn Profile

Wonsuk Ahn

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 9 July 2015 Paper

Development of high-transmittance phase-shifting mask for ArF immersion lithography

Won-suk Ahn, Hwan-Seok Seo, Ju-Mi Bang, Ji-Young Kim, Jae-Min Song, Byoung-Hoon Seung, Hee-Bom Kim, Chan-Uk Jeon

Proceedings Volume 9658, 965808 (2015) https://doi.org/10.1117/12.2203239

KEYWORDS: Photomasks, Chromium, Etching, Transmittance, Semiconducting wafers, Nanoimprint lithography, Phase shifts, Image processing, Immersion lithography, Optical lithography

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Proceedings Article | 20 October 2006 Paper

The study of optical performance for quartz dry etching quality in ArF lithography

Won-Suk Ahn, Hye-Kyung Lee, Young-Ju Park, Hyuk-Joo Kwon, Seong-Woon Choi, Woo-Sung Han

Proceedings Volume 6349, 63490C (2006) https://doi.org/10.1117/12.686839

KEYWORDS: Quartz, Etching, Photomasks, Chromium, Dry etching, Nanoimprint lithography, Resolution enhancement technologies, Critical dimension metrology, Electroluminescence, Lithography

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SPIE Journal Paper | 1 January 2006

Objective video quality assessment

Chulhee Lee, Seungdeuk Cho, Jihwan Choe, Taeuk Jeong, Wonsuk Ahn, Eunjae Lee

OE, Vol. 45, Issue 01, 017004, (January 2006) https://doi.org/10.1117/12.10.1117/1.2160515

KEYWORDS: Video, Video processing, Quality measurement, Image quality, Edge detection, Detection and tracking algorithms, Image processing, Optical engineering, Data modeling, Signal to noise ratio

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Proceedings Article | 28 June 2005 Paper

Evaluations of optical performance for micro-trench on quartz etch in ArF lithography

Won-Suk Ahn, Hyuk-Joo Kwon, Seong-Yong Moon, Seong-Woon Choi, Woo-Sung Han

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617227

KEYWORDS: Photomasks, Quartz, Etching, Semiconducting wafers, Fluorine, Dry etching, Chemistry, Wafer-level optics, Lithography, Nanoimprint lithography

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SPIE Journal Paper | 1 May 2004

Rapid hybrid interpolation methods

Chulhee Lee, Seongduk Cho, Wonseok Ahn, Kwanghoon Sohn

OE, Vol. 43, Issue 05, (May 2004) https://doi.org/10.1117/12.10.1117/1.1666866

KEYWORDS: Image processing, Optical engineering, Video, Video compression, Video processing, Digital cameras, Optical filters, Signal processing, Image quality, Motion estimation

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Proceedings Article | 18 January 2004 Paper

Edge degradation for objective video quality metrics

Chulhee Lee, Sungdeuk Cho, Jihwan Choe, Taewook Jung, Wonsoek Ahn

Proceedings Volume 5308, (2004) https://doi.org/10.1117/12.529804

KEYWORDS: Video, Video processing, Quality measurement, Image processing, Edge detection, Visual system, Detection and tracking algorithms, Image quality, Error analysis, Visual process modeling

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Proceedings Article | 19 November 2003 Paper

Analysis of objective video quality metric using wavelet transform

Chulhee Lee, Jihwan Choe, Wonseok Ahn, Taeuk Jeong, Sungdeuk Cho

Proceedings Volume 5203, (2003) https://doi.org/10.1117/12.506680

KEYWORDS: Video, Video processing, Wavelet transforms, 3D modeling, Spatial frequencies, Performance modeling, Analytical research, Quality measurement, Wavelets, Process modeling

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Proceedings Article | 28 August 2003 Paper

Identification of defect source to control reticle defect density for CAR and dry etching in the photomask process

Sung-Yong Cho, Won-Suk Ahn, Won-Il Cho, Moon-Gyu Sung, Yong-Hoon Kim, Sung-Woon Choi, Hee-Sun Yoon, Jung-Min Sohn

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504055

KEYWORDS: Particles, Inspection, Dry etching, Photomasks, Reticles, Manufacturing, Critical dimension metrology, Scanning electron microscopy, Etching, Chromium

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Proceedings Article | 27 December 2002 Paper

Identification of defect source to control reticle defect density for CAR and dry etching in the photomask process

Sung-Yong Cho, Won-Suk Ahn, Won-Il Cho, Moon-Gyu Sung, Seong-Yong Moon, Seong-Woon Choi, Hee-Sun Yoon, Jung-Min Sohn

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.468096

KEYWORDS: Particles, Inspection, Photomasks, Reticles, Dry etching, Manufacturing, Defect inspection, Scanning electron microscopy, Atomic force microscopy, Quartz

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Showing 5 of 9 publications

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