Dr. Xiangyu Zhou Profile

Dr. Xiangyu Zhou

Principal Engineer at Synopsys GmbH

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Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Design and process-friendly High-NA EUV stitching options

Kevin Lucas, Zachary Levinson, Yunqiang Zhang, Xiangyu Zhou, Kevin Hooker, Linghui Wu, Lin Wang, Michael Lam, Soo-Han Choi, James Ban

Proceedings Volume 13216, 132161U (2024) https://doi.org/10.1117/12.3034869

KEYWORDS: Design, Optical lithography, Design rules, Scanners, Printing, Extreme ultraviolet lithography, Extreme ultraviolet, SRAF, Semiconducting wafers

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Proceedings Article | 16 October 2017 Paper

Rigorous simulation of EUV mask pellicle

Yulu Chen, Xiangyu Zhou, Ulrich Klostermann, Lei Sun, Obert Wood, Mariya Braylovska, Sajan Marokkey, Francis Goodwin

Proceedings Volume 10451, 104510S (2017) https://doi.org/10.1117/12.2280339

KEYWORDS: Pellicles, Photomasks, Extreme ultraviolet, Nanoimprint lithography, Extreme ultraviolet lithography, Transmittance, Temporal coherence, Particles, Nickel, High volume manufacturing

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