Dr. Xiao Li Profile

Dr. Xiao Li

Sr Process Engineer at Broadcom Inc

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Publications (3)

Proceedings Article | 29 March 2006 Paper

Stability of photo resist coating performance of small dispense nozzle size in photolithographic spin coating process

Xiao Li, Tom Lehmann, Warren Greene

Proceedings Volume 6153, 61533A (2006) https://doi.org/10.1117/12.655360

KEYWORDS: Coating, Photoresist processing, Semiconducting wafers, Metals, Etching, Thin film coatings, Critical dimension metrology, Silicon, Manufacturing, Semiconductors

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Proceedings Article | 4 May 2005 Paper

Evaluation of photo resist coating performance of small dispense nozzle size in photolithographic spin coating process

Xiao Li, Tom Lehmann, Warren Greene

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.598471

KEYWORDS: Coating, Photoresist processing, Semiconducting wafers, Lithium, Semiconductors, Manufacturing, Photoresist materials, Critical dimension metrology, Process engineering, Thin film coatings

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Proceedings Article | 14 May 2004 Paper

Double pre-wet RRC (reducing resist consumption) process for deep ultraviolet bottom antireflective coatings (BARC)

Xiao Li, Warren Greene, Chris Bowker

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534150

KEYWORDS: Coating, Semiconducting wafers, Photoresist processing, Deep ultraviolet, Critical dimension metrology, Bottom antireflective coatings, Semiconductors, Manufacturing, Silicon, Etching

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