Prof. Xiaoyan Hu Profile

Prof. Xiaoyan Hu

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Proceedings Article | 22 January 2025 Paper

The influences of mirror deflection on the surface shapes of different MEMS mirror structures

Meng Zhang, Weiping Wang, Jing Cao, Song Liu, Xiaoyan Hu, Cheng ao Yang

Proceedings Volume 13520, 135200U (2025) https://doi.org/10.1117/12.3057200

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The MEMS Fabry-Perot cavity length can be tuned by moving the MEMS micro mirror to achieve narrowband filtering of the incident continuous spectrum. However, the mirror surface shape would be changed with the deflection of the MEMS micro mirror, affecting the bandwidth and transmittance of the transmission spectrum. By using finite element modeling and simulation, the variation of the surface shapes of different MEMS mirror structures with the mirror deflection were studied. The stress distribution introduced by the mirror deflection were also characterized and the reason for the variation of the surface shapes were also analyzed. By selecting an appropriate elastic beam mounted on the movable micro mirror, the influence of stress introduced by the mirror deflection on the mirror surface shapes could be reduced. The sensitivity of the spectrum filtering performance to the mirror deflection could be lowered to improve the robustness.

Proceedings Article | 31 May 2023 Paper

Effect of the cone angle of incident light beam on the performance characterization of MEMS F-P filter

Meng Zhang, Cheng ao Yang, Weiping Wang, Jing Cao, Song Liu, Xiaoyan Hu

Proceedings Volume 12711, 127110L (2023) https://doi.org/10.1117/12.2684221

KEYWORDS: Mirrors, Tunable filters, Transmittance, Optical filters, Microelectromechanical systems

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The tunability of optical transmittance spectra can be available by mounting one of the mirrors of the Fabry-Perrot cavity on a movable structure. The F-P filter prepared by adopting MEMS process can realize the advantages of miniaturization, array, and high output. The size of the MEMS F-P filter can be reduced to a few hundred micrometers. This feature introduces a new problem for the characterization of optical performance, that is, the incident light needs to be focused onto the mirror with a size of a few hundred micrometers. However, in the actual test, the incident light with a hundred-micron spot is usually a convergent beam with a certain cone angle. It is found that through theoretical analysis, compared to parallel incident light, the convergent light beam passed through the F-P cavity leads to the decrease at peak transmittance and the broadening of full width at half maximum. The reason for that was the converging light with a cone angle passing through the F-P cavity had different incident angles and caused diverse optical path difference. As a result, the light emitting from the cavity with various wavelength would appear in the transmission spectra. In summary, the test results under the converging light could not truly reflect the performance of the F-P cavity and the influence of the cone angle of incident light beam on the performance characterization of MEMS F-P filter was analyzed by theoretical arithmetic and simulation.

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