High-quality factor(Q) waveguide ring resonators (WRRs) are essential components of the resonator-integrated optical gyroscope (RIOG). The single-mode and multimode silicon oxynitride (SION) WRRs are investigated in this paper. The optical, resonance, and polarization properties are characterized. The intrinsic Q of single-mode WRR is 8.25×105 . And the multimode WRR achieves an intrinsic Q of 1.02×106 , corresponding to the waveguide propagation loss of 0.3 dB/cm. The designed multimode SION WRRs can be used as a critical sensing element to enhance RIOG performance further. Keywords: High Q ring resonators, Multi-mode SION waveguide, Integrated optics.
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