Dr. Xue Chuan Shan Profile

Dr. Xue Chuan Shan

at Singapore Institute of Manufacturing Technology

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Author

Publications (10)

Proceedings Article | 7 February 2006 Paper

Process simulation of Kovar-glass-silicon bonding for micromachined combustor

Ying Zhao, Min Miao, Yufeng Jin, Xue Chuan Shan, Chee Khuen Wong

Proceedings Volume 6032, 60320C (2006) https://doi.org/10.1117/12.667859

KEYWORDS: Glasses, Silicon, Semiconducting wafers, Metals, Deep reactive ion etching, Combustion, Prototyping, Microelectromechanical systems, Etching, Manufacturing

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Proceedings Article | 23 February 2005 Paper

Development of a MEMS-based micro combustor for a micro gas turbine engine

Xue Chuan Shan, Yu Jin, Zhen Wang, Chee Khuen Wong, Y. Murakoshi, Ryutaro Maeda

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.580783

KEYWORDS: Semiconducting wafers, Deep reactive ion etching, Combustion, Etching, Temperature metrology, Silicon, Hydrogen, Prototyping, Photoresist materials, Optical lithography

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Proceedings Article | 22 January 2005 Paper

Universal fixture for assembling and testing of a silicon-based microcombustor

Yufeng Jin, Xue Chuan Shan, Zhenfeng Wang, Haixia Zhang, Chee Khuen Wong

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.588962

KEYWORDS: Combustion, Silicon, Temperature metrology, Hydrogen, Semiconducting wafers, Metals, Interfaces, Crystals, Prototyping, Surface finishing

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Proceedings Article | 2 April 2004 Paper

High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine

Xue Shan, Yoichi Murakoshi, Zhenfeng Wang, H. Lu, Yufeng Jin, Tsuyoshi Ikehara, Ryutaro Maeda, C. Wong

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522918

KEYWORDS: Semiconducting wafers, Etching, Deep reactive ion etching, Plasma, Silicon, Photoresist materials, Photomasks, Ions, Surface roughness, Process control

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Proceedings Article | 2 April 2004 Paper

Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet

Yoichi Murakoshi, Xue-Chuan Shan, Toshio Sano, Masaharu Takahashi, Ryutaro Maeda

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522898

KEYWORDS: Mirrors, Nickel, Optical switching, Microelectromechanical systems, Polymers, Optical design, Scanning electron microscopy, Nanoelectromechanical systems, Optical semiconductors, Semiconductors

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Proceedings Article | 21 January 2003 Paper

Development of 1X4 micro-optical switch based on SOI vertical micromirror technology

Zhenfeng Wang, Xue Chuan Shan, Zhiping Wang, Wenqing Cao, Jianfeng Xu, Siak-Piang Lim, Wilfried Noell, Nico de Rooij

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472787

KEYWORDS: Mirrors, Switches, Optical switching, Actuators, Packaging, Silicon, Deep reactive ion etching, Finite element methods, Fiber optics, Micromirrors

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Proceedings Article | 16 January 2003 Paper

Dual-function leak detector for MEMS devices

Yufeng Jin, Zhiping Wang, Zhen Feng Wang, X. Shi, P. Lim, Min Miao, X. Shan

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472715

KEYWORDS: Sensors, Microelectromechanical systems, Helium, Silicon, Packaging, Protactinium, Detector development, Optical switching, Glasses, Semiconducting wafers

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Proceedings Article | 13 November 2002 Paper

Optimization of Au mask fabrication processes for LIGA applications

Xue Shan, Ryutaro Maeda, Tsuyoshi Ikehara, H. Mekaru, T. Hattori

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.471926

KEYWORDS: Gold, Photomasks, Etching, X-rays, Mirrors, Optical switching, Electroplating, Micromirrors, Polymethylmethacrylate, Photoresist materials

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Proceedings Article | 13 November 2002 Paper

Development of a micro hot embossing process for fabricating micro optical devices

Xue Shan, Ryutaro Maeda, Yoichi Murakoshi

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469430

KEYWORDS: Mirrors, Optical switching, Switches, Polymers, Annealing, Micromirrors, Nickel, Silicon, Optical components, Microelectromechanical systems

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Proceedings Article | 19 April 2002 Paper

Development of a new 1x4 micro-optical switch

Zhiping Wang, Xue Shan, Z. Wang, Siak-Piang Lim, K. Lee, Wilfried Noell, Nico de Rooij

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462854

KEYWORDS: Mirrors, Optical switching, Switching, Silicon, Switches, Deep reactive ion etching, Reflection, Structured optical fibers, Actuators, Single mode fibers

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Showing 5 of 10 publications

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