Dr. Xue Chuan Shan
at Singapore Institute of Manufacturing Technology
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 7 February 2006 Paper
Ying Zhao, Min Miao, Yufeng Jin, Xue Chuan Shan, Chee Khuen Wong
Proceedings Volume 6032, 60320C (2006) https://doi.org/10.1117/12.667859
KEYWORDS: Glasses, Silicon, Semiconducting wafers, Metals, Deep reactive ion etching, Combustion, Prototyping, Microelectromechanical systems, Etching, Manufacturing

Proceedings Article | 23 February 2005 Paper
Xue Chuan Shan, Yu Jin, Zhen Wang, Chee Khuen Wong, Y. Murakoshi, Ryutaro Maeda
Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.580783
KEYWORDS: Semiconducting wafers, Deep reactive ion etching, Combustion, Etching, Temperature metrology, Silicon, Hydrogen, Prototyping, Photoresist materials, Optical lithography

Proceedings Article | 22 January 2005 Paper
Yufeng Jin, Xue Chuan Shan, Zhenfeng Wang, Haixia Zhang, Chee Khuen Wong
Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.588962
KEYWORDS: Combustion, Silicon, Temperature metrology, Hydrogen, Semiconducting wafers, Metals, Interfaces, Crystals, Prototyping, Surface finishing

Proceedings Article | 2 April 2004 Paper
Xue Shan, Yoichi Murakoshi, Zhenfeng Wang, H. Lu, Yufeng Jin, Tsuyoshi Ikehara, Ryutaro Maeda, C. Wong
Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522918
KEYWORDS: Semiconducting wafers, Etching, Deep reactive ion etching, Plasma, Silicon, Photoresist materials, Photomasks, Ions, Surface roughness, Process control

Proceedings Article | 2 April 2004 Paper
Yoichi Murakoshi, Xue-Chuan Shan, Toshio Sano, Masaharu Takahashi, Ryutaro Maeda
Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522898
KEYWORDS: Mirrors, Nickel, Optical switching, Microelectromechanical systems, Polymers, Optical design, Scanning electron microscopy, Nanoelectromechanical systems, Optical semiconductors, Semiconductors

Showing 5 of 10 publications
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