R-C optical systems have been widely used in long focal length imaging and long-distance detection fields such as aerospace, remote sensing, exploration, and space optical communication. However, the significant wavefront aberration in the edge fields of R-C optical system always restrict the imaging system in a small field of view. In this paper, the improved R-C optical system is composed of two reflective mirrors as well as three refractive elements, which can correct off-axis aberrations in large fields of view, enable the large field of view imaging. For the high accuracy assembly, optical centering assembling technology based on optical imaging principle is applied to ensure the coaxiality between the optical axis of optical element and the rotation axis of corresponding machine part. And the reverse optimization method is carried out to compensated the wavefront aberration introduced by misalignment errors. Finally, the testing optimization result of system wavefront aberration with RMS value of center of view is 0.045λ (λ=0.6328nm), and the RMS value of off-axis field better than 0.08λ can be achieved.
As the most widely used optical structure, coaxial optical system has become the critical component of many elaborate compound machines. However, with the development of science and technology, aerospace and lithography technology has put forward higher requirements on the imaging quality of ultra-precision coaxial optical system. And the optical axis consistency condition plays a critical role in the system imaging quality. In this paper, the dual optical path system based on light splitting prism is introduced, in which the coaxiality of the dual optical path become a critical issue. For the high coaxiality assembly, the optical centering assembling technology based on optical imaging principle is applied to ensure the coaxiality among the optical axis of optical element, the rotation axis of corresponding machine part and the rotation axis of lathe. According to the optical auto-collimation imaging principle, the visualization and transmission of the main datum of the optical system is completed, which will ensure the datum conversion completed with high precision. Finally, the experiment has been conducted and the coaxiality of the actual dual optical system is better than 0.05mm.
The deflectometry based on reverse-Hartmann-test configuration provides a feasible way for wavefront testing. Objects with complex surfaces place a high requirement on the wavefront testing accuracy, in which the systematic parameter is the key issue. In this paper, the effect of systematic parameters of the testing system such as the geometrical error and the approximation of systematic geometrical parameters are discussed in detail and a calibration method is proposed. Numerical simulation is carried out to demonstrate the feasibility of the proposed calibration method, for the transmitted wavefront with RMS 3.1220 μm, the testing optimization result of residual error with RMS value better than 20 nm is achieved.
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