Mr. Yasuaki Fukuda Profile

Yasuaki Fukuda

General Manager at Canon Inc

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Author

Publications (17)

Proceedings Article | 18 March 2009 Paper

Analysis of carbon deposition on multilayer mirrors by using two different beamlines

Takahiro Nakayama, Akira Miyake, Hiromitsu Takase, Shigeru Terashima, Takashi Sudo, Yutaka Watanabe, Yasuaki Fukuda

Proceedings Volume 7271, 72713P (2009) https://doi.org/10.1117/12.813587

KEYWORDS: Carbon, Extreme ultraviolet, Protactinium, Mirrors, Molecules, Adsorption, Extreme ultraviolet lithography, Synchrotron radiation, Information operations, Data modeling

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Proceedings Article | 21 March 2008 Paper

Phenomenological analysis of carbon deposition rate on the multilayer mirror

Takahiro Nakayama, Hiromitsu Takase, Shigeru Terashima, Takashi Sudo, Yutaka Watanabe, Yasuaki Fukuda, Katsuhiko Murakami, Shintaro Kawata, Takashi Aoki, Shuichi Matsunari, Yukinobu Kakutani, Masahito Niibe

Proceedings Volume 6921, 69213B (2008) https://doi.org/10.1117/12.769958

KEYWORDS: Carbon, Extreme ultraviolet, Mirrors, Protactinium, Extreme ultraviolet lithography, Multilayers, Bioalcohols, Chemical species, Coating, Oxidation

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Proceedings Article | 21 March 2008 Paper

Protection from surface oxidation of Ru capping layers for EUVL projection optics mirrors by introducing hydrocarbon gas

Keigo Koida, Masahito Niibe, Yukinobu Kakutani, Shuichi Matsunari, Takashi Aoki, Shigeru Terashima, Takahiro Nakayama, Hiromitsu Takase, Yasuaki Fukuda

Proceedings Volume 6921, 69213C (2008) https://doi.org/10.1117/12.771814

KEYWORDS: Mirrors, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Bioalcohols, Carbon, Oxides, Protactinium, Oxygen, Oxidation

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Proceedings Article | 21 March 2007 Paper

Carbon deposition on multi-layer mirrors by extreme ultra violet ray irradiation

S. Matsunari, T. Aoki, K. Murakami, Y. Gomei, S. Terashima, H. Takase, M. Tanabe, Y. Watanabe, Y. Kakutani, M. Niibe, Y. Fukuda

Proceedings Volume 6517, 65172X (2007) https://doi.org/10.1117/12.710816

KEYWORDS: Carbon, Extreme ultraviolet, Mirrors, Gases, Natural surfaces, Reflectivity, Adsorption, Protactinium, Lithography, Extreme ultraviolet lithography

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Proceedings Article | 21 March 2007 Paper

Long-term durability of a Ru capping layer for EUVL projection optics by introducing ethanol

Yukinobu Kakutani, Masahito Niibe, Yoshio Gomei, Hiromitsu Takase, Shigeru Terashima, Shuichi Matsunari, Takashi Aoki, Yasuaki Fukuda

Proceedings Volume 6517, 651731 (2007) https://doi.org/10.1117/12.711364

KEYWORDS: Extreme ultraviolet, Mirrors, Reflectivity, Bioalcohols, Extreme ultraviolet lithography, Protactinium, Ruthenium, Carbon, Oxygen, Oxidation

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Proceedings Article | 24 March 2006 Paper

New contamination experimental equipment in the NewSUBARU and evaluation of Si-capped multilayer mirrors using it

Masahito Niibe, Yukinobu Kakutani, Shigeru Terashima, Hiromitsu Takase, Yoshio Gomei, Shuichi Matsunari, Takashi Aoki, Katsuhiko Murakami, Yasuaki Fukuda

Proceedings Volume 6151, 615134 (2006) https://doi.org/10.1117/12.656845

KEYWORDS: Extreme ultraviolet, Mirrors, Reflectivity, Contamination, Extreme ultraviolet lithography, Absorption, Carbon, Protactinium, Oxygen, In situ metrology

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Proceedings Article | 23 March 2006 Paper

Effect of residual gas atmosphere on lifetime of Ru-capped EUVL projection optics mirror

Yukinobu Kakutani, Masahito Niibe, Yoshio Gomei, Hiromitsu Takase, Shigeru Terashima, Shuichi Matsunari, Takashi Aoki, Katsuhiko Murakami, Yasuaki Fukuda

Proceedings Volume 6151, 61510H (2006) https://doi.org/10.1117/12.656240

KEYWORDS: Reflectivity, Extreme ultraviolet, Mirrors, Protactinium, Extreme ultraviolet lithography, Projection systems, Atmospheric optics, Carbon, Lithography, Oxidation

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Proceedings Article | 6 May 2005 Paper

Reflectance change of Si- and Ru-capped Mo/Si multilayer mirrors caused by intense EUV irradiation

Yukinobu Kakutani, Masahito Niibe, Hiromitsu Takase, Shigeru Terashima, Hiroyuki Kondo, Shuichi Matsunari, Takashi Aoki, Yoshio Gomei, Yasuaki Fukuda

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599577

KEYWORDS: Reflectivity, Extreme ultraviolet, Carbon, Protactinium, Mirrors, Extreme ultraviolet lithography, Chemical species, Oxygen, Optical filtering, Oxidation

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Proceedings Article | 18 October 2004 Paper

A reflectance measurement system for investigating radiation damage to EUVL mirrors in NewSUBARU

Yukinobu Kakutani, Masahito Niibe, Kazuya Kakiuchi, Hiromitsu Takase, Shigeru Terashima, Hiroyuki Kondo, Shuichi Matsunari, Takashi Aoki, Yoshio Gomei, Yasuaki Fukuda

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.559395

KEYWORDS: Reflectivity, Mirrors, Protactinium, Extreme ultraviolet lithography, Extreme ultraviolet, Carbon, Optical testing, Absorption, Oxygen, Gases

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Proceedings Article | 30 July 2002 Paper

Development of environmental control technologies for 157-nm lithography at ASET

Yasuaki Fukuda, Seiji Takeuchi, Takashi Aoki, Hiroyuki Nagasaka, Soichi Owa, Fumika Yoshida, Youichi Kawasa, Keiji Egawa, Takehito Watanabe, Ikuo Uchino, Akira Sumitani, Kiyoharu Nakao

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474622

KEYWORDS: Adhesives, Oxygen, Metals, Quartz, Lithography, Systems modeling, Transmittance, Information operations, Lenses, Scanning electron microscopy

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Proceedings Article | 14 September 2001 Paper

Present status of development of gas-purging and chemically clean technologies at ASET

Yasuaki Fukuda, Seiji Takeuchi, Takashi Aoki, Soichi Owa, Fumika Yoshida, Youichi Kawasa, Akira Sumitani, Keiji Egawa, Takehito Watanabe, Kiyoharu Nakao

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435763

KEYWORDS: Oxygen, Nitrogen, Surface finishing, Contamination, Lithography, Sensors, Gases, Optical testing, Transmittance, Absorption

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Proceedings Article | 27 May 1996 Paper

Application of SR lithography to 0.14-um device fabrication

Hiroaki Sumitani, Kenji Itoga, Hiroki Shimano, Sunao Aya, Hideki Yabe, Takashi Hifumi, Hiroshi Watanabe, Koji Kise, Masami Inoue, Kenji Marumoto, Yasutaka Nishioka, Haruhiko Abe, Nobutoshi Mizusawa, Kenji Saitoh, Yasuaki Fukuda, Shunichi Uzawa

Proceedings Volume 2723, (1996) https://doi.org/10.1117/12.240474

KEYWORDS: Lithography, Photomasks, X-rays, Optical alignment, Semiconducting wafers, X-ray lithography, Overlay metrology, Mask making, Fabrication, Photoresist processing

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Proceedings Article | 1 February 1994 Paper

Recent progress in collisionally excited x-ray laser research at the Institute of Laser Engineering

Yoshiaki Kato, Hiroyuki Daido, Ryosuke Kodama, Kensuki Murai, G. Yuan, M. Schulz, Masanobu Yamanaka, Masaru Takagi, Tadashi Kanabe, Sadao Nakai, David Neely, Andrew MacPhee, Ciaran Lewis, Gary Slark, Masahito Niibe, Masami Tsukamoto, Yasuaki Fukuda, Hiroshi Tsunemi, Susumu Nomoto, Itsuo Kodama, Takeo Honda, Kunio Shinohara, Hiroshi Iwasaki, Tatsuo Yoshinobu

Proceedings Volume 2012, (1994) https://doi.org/10.1117/12.167381

KEYWORDS: X-ray lasers, X-rays, Germanium, Holograms, Charge-coupled devices, Holography, Plasma, Laser engineering, Refraction, Spatial resolution

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Proceedings Article | 20 October 1992 Paper

Fabrication and evaluation of Cr-C multilayer mirrors for soft x rays

Masahito Niibe, Masami Tsukamoto, Takashi Iizuka, Akira Miyake, Yutaka Watanabe, Yasuaki Fukuda

Proceedings Volume 1720, (1992) https://doi.org/10.1117/12.132127

KEYWORDS: Reflectivity, X-rays, Transmission electron microscopy, Chromium, Mirrors, Moire patterns, Crystals, Grazing incidence, Nickel, Argon

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Proceedings Article | 20 October 1992 Paper

Radiation damage of multilayer mirrors for soft x-ray lasers

Masami Tsukamoto, Masahito Niibe, Yutaka Watanabe, Akira Miyake, Takashi Iizuka, Yasuaki Fukuda, Yoshiaki Kato, Hiroyuki Shiraga, Hiroyuki Daido, Kensuki Murai, Ciaran Lewis, David Neely, Domhnail O'Neill

Proceedings Volume 1720, (1992) https://doi.org/10.1117/12.132129

KEYWORDS: Mirrors, X-rays, Plasma, Germanium, Particles, Reflectivity, X-ray lasers, Silicon, Light scattering, Multilayers

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Proceedings Article | 5 February 1992 Paper

Development of soft x-ray lasers at the Institute of Laser Engineering: recent results on Ge soft x-ray laser (Invited Paper)

Yoshiaki Kato, Hiroyuki Daido, Hiroyuki Shiraga, Masanobu Yamanaka, Hiromi Azuma, Kensuki Murai, E. Miura, G. Yuan, M. Ohmi, Kazuo Tanaka, Tadashi Kanabe, Masaru Takagi, Sadao Nakai, Ciaran Lewis, Domhnail O'Neill, David Neely, Kunio Shinohara, Masahito Niibe, Yasuaki Fukuda

Proceedings Volume 1551, (1992) https://doi.org/10.1117/12.134808

KEYWORDS: X-ray lasers, Germanium, X-rays, Mirrors, Spatial coherence, Laser engineering, Spectroscopy, Pulsed laser operation, Ions, Amplifiers

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Proceedings Article | 1 February 1991 Paper

Suppression of columnar-structure formation in Mo-Si layered synthetic microstructures

Masahito Niibe, Masami Hayashida, Takashi Iizuka, Akira Miyake, Yutaka Watanabe, Rie Takahashi, Yasuaki Fukuda

Proceedings Volume 1343, (1991) https://doi.org/10.1117/12.23172

KEYWORDS: Reflectivity, Argon, X-rays, Interfaces, Sputter deposition, Transmission electron microscopy, Chemical species, Acquisition tracking and pointing, Photomicroscopy, Molybdenum

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Showing 5 of 17 publications

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