Yasuaki Fukuda
General Manager at Canon Inc
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 18 March 2009 Paper
Takahiro Nakayama, Akira Miyake, Hiromitsu Takase, Shigeru Terashima, Takashi Sudo, Yutaka Watanabe, Yasuaki Fukuda
Proceedings Volume 7271, 72713P (2009) https://doi.org/10.1117/12.813587
KEYWORDS: Carbon, Extreme ultraviolet, Protactinium, Mirrors, Molecules, Adsorption, Extreme ultraviolet lithography, Synchrotron radiation, Information operations, Data modeling

Proceedings Article | 21 March 2008 Paper
Proceedings Volume 6921, 69213B (2008) https://doi.org/10.1117/12.769958
KEYWORDS: Carbon, Extreme ultraviolet, Mirrors, Protactinium, Extreme ultraviolet lithography, Multilayers, Bioalcohols, Chemical species, Coating, Oxidation

Proceedings Article | 21 March 2008 Paper
Proceedings Volume 6921, 69213C (2008) https://doi.org/10.1117/12.771814
KEYWORDS: Mirrors, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Bioalcohols, Carbon, Oxides, Protactinium, Oxygen, Oxidation

Proceedings Article | 21 March 2007 Paper
S. Matsunari, T. Aoki, K. Murakami, Y. Gomei, S. Terashima, H. Takase, M. Tanabe, Y. Watanabe, Y. Kakutani, M. Niibe, Y. Fukuda
Proceedings Volume 6517, 65172X (2007) https://doi.org/10.1117/12.710816
KEYWORDS: Carbon, Extreme ultraviolet, Mirrors, Gases, Natural surfaces, Reflectivity, Adsorption, Protactinium, Lithography, Extreme ultraviolet lithography

Proceedings Article | 21 March 2007 Paper
Proceedings Volume 6517, 651731 (2007) https://doi.org/10.1117/12.711364
KEYWORDS: Extreme ultraviolet, Mirrors, Reflectivity, Bioalcohols, Extreme ultraviolet lithography, Protactinium, Ruthenium, Carbon, Oxygen, Oxidation

Showing 5 of 17 publications
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