Mr. Yichen Zhao Profile

Yichen Zhao

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Publications (2)

Proceedings Article | 1 August 2023 Paper

Fast mask optimization based on self-calibrated convolutions

Yichen Zhao, Shuang Xu, Jinwei Pan

Proceedings Volume 12747, 127470E (2023) https://doi.org/10.1117/12.2689153

KEYWORDS: Source mask optimization, Calibration, Convolution, Lithography, Mathematical optimization, Education and training, Imaging systems, Semiconducting wafers, Image processing, Optics manufacturing

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Proceedings Article | 1 August 2023 Paper

EUV photomask defect detection based on image segmentation

Xianhao Peng, Shuang Xu, Yichen Zhao

Proceedings Volume 12747, 127470Z (2023) https://doi.org/10.1117/12.2689144

KEYWORDS: Photomasks, Image segmentation, Extreme ultraviolet, Defect detection, Neural networks, Image processing, Printing, Machine learning, Feature fusion

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