Mr. Yong-Hyun Lim Profile

Yong-Hyun Lim

at SK Hynix Inc

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Author

Publications (4)

Proceedings Article | 3 April 2017 Paper

Overlay control for nanoimprint lithography

Kazuya Fukuhara, Masato Suzuki, Masaki Mitsuyasu, Takuya Kono, Tetsuro Nakasugi, Yonghyun Lim, Wooyung Jung

Proceedings Volume 10144, 1014409 (2017) https://doi.org/10.1117/12.2256715

KEYWORDS: Nanoimprint lithography, Overlay metrology, Optical alignment, Lithography, Semiconducting wafers, Distortion, Process control, Error analysis, Silicon, Semiconductor manufacturing

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Proceedings Article | 21 March 2017 Paper

The opportunity and challenge of spin coat based nanoimprint lithography

Wooyung Jung, Jungbin Cho, Eunhyuk Choi, Yonghyun Lim, Cheolkyu Bok, Masatoshi Tsuji, Kei Kobayashi, Takuya Kono, Tetsuro Nakasugi

Proceedings Volume 10144, 1014412 (2017) https://doi.org/10.1117/12.2257845

KEYWORDS: Particles, Semiconducting wafers, Nanoimprint lithography, Coating, Optical lithography, Logic, Manufacturing, Defect inspection, High volume manufacturing, Lithography, Ultraviolet radiation, Photoresist processing

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Proceedings Article | 5 April 2012 Paper

How to minimize CD variation and overlay degradation induced by film stress

Woo-Yung Jung, Yong-Hyun Lim, Shin-Ae Park, Sang-Joon Ahn, Ji-Hyun Lee, Jung-A Yoo, Seung-Ho Pyi, Jin-Woong Kim

Proceedings Volume 8324, 83242L (2012) https://doi.org/10.1117/12.916035

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Overlay metrology, Photoresist processing, Carbon, Optical lithography, Temperature metrology, Semiconductors, Metrology, Wafer inspection

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Proceedings Article | 16 April 2011 Paper

A study of an acid-induced defect on chemically amplified photoresist applied to sub-30nm NAND flash memory

Yong-Hyun Lim, Jae-Doo Eom, Woo-Yung Jung, Min-Sik Jang, Byung-Seok Lee, Jin-Woong Kim

Proceedings Volume 7972, 79722W (2011) https://doi.org/10.1117/12.869936

KEYWORDS: Photoresist materials, Oxides, Silicon, Silicon films, Semiconducting wafers, Photoresist developing, Diffusion, Ions, Gases, Chemical reactions

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