Dr. Yong-Ju Jeon Profile

Dr. Yong-Ju Jeon

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

SPIE Journal Paper | 10 October 2024 Open Access

Detection of defective chips from nanostructures with a high-aspect ratio using hyperspectral imaging and deep learning

Sunhong Jun, Wonjun Choi, Yong-Ju Jeon, Jeongsu Ha, Kyuhwan Kim, Sungyoon Ryu, Myungjun Lee, Yongdeok Jeong, Younghoon Sohn

JM3, Vol. 23, Issue 04, 044002, (October 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.044002

KEYWORDS: Intelligence systems, Semiconducting wafers, Etching, Defect detection, Deep learning, Scanning electron microscopy, Nanostructures, Inspection, Hyperspectral imaging, Metrology

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Proceedings Article | 27 April 2023 Presentation + Paper

Semiconductor device metrology for detecting defective chip due to high aspect ratio-based structures using hyperspectral imaging and deep learning

Sunhong Jun, Wonjun Choi, DongHoon Kim, Hayan Park, Dongmin Kyeon, Kyounghwan Lee, Yong-Ju Jeon, Chaemin Lee, Kwangchul Kim, Jeongsu Ha, Sungyoon Ryu, Younghoon Son, Yongdeok Jung

Proceedings Volume 12496, 124961F (2023) https://doi.org/10.1117/12.2657062

KEYWORDS: Intelligence systems, Semiconducting wafers, Deep learning, 3D metrology, Hyperspectral imaging, Etching, Metrology, 3D modeling, Imaging spectroscopy, Defect detection

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Proceedings Article | 27 April 2023 Presentation + Paper

Detection of defective areas and hidden weak patterns in the wafer using massive measurement data

DongHoon Kim, Sungyoon Ryu, Sunhong Jun, Heeyoon Han, Wonjun Choi, Yong-Ju Jeon, Hyun Lee, Souk Kim, Younghoon Sohn

Proceedings Volume 12496, 124961Y (2023) https://doi.org/10.1117/12.2657064

KEYWORDS: Semiconducting wafers, Signal detection, Defect detection, Metrology, Signal processing, Semiconductors, Semiconductor manufacturing, Fourier transforms, Fabrication

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