Dr. Yu Guan Profile

Dr. Yu Guan

Scientist at VLSI Standards Inc

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Publications (2)

Proceedings Article | 2 April 2010 Paper

SI-traceable calibration of line-width roughness of 25nm NanoCD standard

V. Ukraintsev, M. Helvey, Y. Guan, B. Mikeska

Proceedings Volume 7638, 76383U (2010) https://doi.org/10.1117/12.858774

KEYWORDS: Line width roughness, Calibration, Standards development, 3D imaging standards, Very large scale integration, Atomic force microscopy, Silicon, Manufacturing, Lithium, Lab on a chip

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Proceedings Article | 2 June 2003 Paper

NIST-traceable calibration of CD-SEM magnification using a 100-nm pitch standard

Marco Tortonese, Yu Guan, Jerry Prochazka

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.482648

KEYWORDS: Calibration, Line edge roughness, Contamination, Statistical analysis, Standards development, Metrology, Electron beams, Distance measurement, Edge detection, Detection and tracking algorithms

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