For most of the current white light interferometer mechanical structure are vertical structure and the size of the inspected parts have limitations, this paper mainly uses white light vertical scanning measurement technology to develop the measurement system for in-situ measurement of ultra-precision machined parts surface three-dimensional topography, white light interferometer mechanical structure design and machine tool integration, to carry out the design of the mechanical structure of the white light interferometer and the integration of the machine tool, and the completion of the measurement system to build a physical example of the system to test the verification of the reliability of the system.
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