Dr. Yueming Hua Profile

Dr. Yueming Hua

Applications Scientist at Park Systems Inc

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Publications (6)

Proceedings Article | 5 April 2012 Paper

High-throughput and non-destructive sidewall roughness measurement using 3-dimensional atomic force microscopy

Yueming Hua, Cynthia Buenviaje-Coggins, Yong-ha Lee, Sang-il Park

Proceedings Volume 8324, 83240I (2012) https://doi.org/10.1117/12.918377

KEYWORDS: Atomic force microscopy, Photoresist materials, 3D image processing, 3D metrology, 3D scanning, Image resolution, Laser scanners, Metrology, Line edge roughness, Scanners

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Proceedings Article | 20 April 2011 Paper

New three-dimensional AFM for CD measurement and sidewall characterization

Yueming Hua, Cynthia Buenviaje-Coggins, Yong-ha Lee, Jung-min Lee, Kyung-deuk Ryang, Sang-il Park

Proceedings Volume 7971, 797118 (2011) https://doi.org/10.1117/12.879545

KEYWORDS: Atomic force microscopy, Scanners, Photoresist materials, Critical dimension metrology, Line edge roughness, Line width roughness, Image resolution, Scanning electron microscopy, 3D metrology, Metrology

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Proceedings Article | 3 June 2010 Paper

Advanced 3D metrology atomic force microscope with crosstalk eliminated

Yueming Hua, Cynthia Coggins, Sung Park, Sang-il Park

Proceedings Volume 7729, 77290N (2010) https://doi.org/10.1117/12.853679

KEYWORDS: Atomic force microscopy, Scanners, 3D metrology, 3D image processing, Metrology, Atomic force microscope, Laser scanners, 3D scanning, Reflectivity, LCDs

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SPIE Journal Paper | 1 April 2007

Nanoscale thermal lithography by local polymer decomposition using a heated atomic force microscope cantilever tip

Yueming Hua, Shubham Saxena, Clifford Henderson, William King

JM3, Vol. 6, Issue 02, 023012, (April 2007) https://doi.org/10.1117/12.10.1117/1.2743374

KEYWORDS: Polymers, Polymer thin films, Lithography, Optical lithography, Atomic force microscope, Metrology, Scanning probe lithography, Silicon, In situ metrology, Silicon films

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Proceedings Article | 21 March 2007 Paper

Direct three-dimensional nanoscale thermal lithography at high speeds using heated atomic-force microscope cantilevers

Yueming Hua, Shubham Saxena, Jung Lee, William King, Clifford Henderson

Proceedings Volume 6517, 65171L (2007) https://doi.org/10.1117/12.713374

KEYWORDS: Polymers, Polymer thin films, Lithography, Modulation, Electron beam lithography, Atomic force microscopy, Atomic force microscope, Optical lithography, Manufacturing, Silicon

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Proceedings Article | 31 March 2006 Paper

Nanolithography in thermally sacrificial polymers using nanoscale thermal probes

Yueming Hua, Shubham Saxena, William King, Clifford Henderson

Proceedings Volume 6153, 61531G (2006) https://doi.org/10.1117/12.661803

KEYWORDS: Polymers, Lithography, Optical lithography, Nanolithography, Crystals, Thin films, Atomic force microscope, Glasses, Resistance, Atomic force microscopy

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Showing 5 of 6 publications

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