Determination of the removal function is an important step in magnetorheological finishing (MRF) of optical materials. However, the removal function is difficult to determine if a spot sample of the same material as that needing polish is unavailable, thus preventing establishment of an MRF process plan. A method to resolve this issue is proposed, wherein an MRF process plan for an item of a differing optical material is migrated. The theoretical basis for migration is investigated, and simulations reveal that narrow nonlinear regions of the source and target materials’ removal functions are a necessary condition for adequate convergence rate. The proposed method is experimentally verified by finishing a ZnS part with the process plan of a BK7 optical part of the same geometry, with a convergence rate of 45.7% after four iterations.
In magnetorheological finishing (MRF), predicting the size of a removal function plays an important role in determining the efficiency of optical material removal. The size of the removal function can be adjusted for different immersion depths of optical parts into the MRF ribbon, which enables the development of multiple MRF-processing algorithms: dwell-time calculation, path planning, or dynamic control of MRF instruments. However, few methods for such algorithms have been developed to dynamically approximate the size of removal functions with respect to various immersion depths. Thus, the ability to dynamically approximate the size of the MRF removal function is indeed of significance. A dynamic approximation method is designed after analyzing the generation mechanism of removal function and its size; establishing the equations for size, which are further numerically analyzed and simplified for common MRF configurations; and approximating the length and width of removal function dynamically. The approximation accuracy is verified through experimental tests where UBK7 optical parts are polished on a PKC1000-Q2 MRF installation. It is revealed that the approximation errors for the length and width are less than 6% and 8%, respectively.
Magnetorheological finishing (MRF) is usually used to remove subsurface defects (SSD) of workpieces to improve the laser-induced damage threshold due to its low stress. Although MRF has been widely used to remove surface defects and SSD, the evolution and removal mechanism of surface scratches under MRF have not been fully elucidated. A systematic study is conducted on the scratch removal process and removal ability of MRF. First, an experimental study on the removal of scratches with different depths is carried out, and the effect of the scratch depth on the removal efficiency is analyzed. Second, when the scratches are removed, the processing is performed in two directions: parallel and perpendicular to the scratch. Thereby, the relationship between the scratch removal efficiency (SRE) and the processing direction is analyzed. Finally, based on the scratch removal process and mechanism, an innovative method for efficient scratch removal using a sacrificial layer is proposed. The effectiveness of this method is verified by experiments. This method can significantly improve the SRE of MRF.
Single-crystal silicon is a typical infrared optical material, commonly machined by single-point diamond turning (SPDT) with micro-level figure accuracy and nano-level roughness. However, the tool marks, surface damage and middle-frequency error left by the diamond turning process may greatly affect the imaging quality. Magnetorheological finishing (MRF) is a deterministic, sub-aperture polishing technology that is very helpful in improving both surface nano-roughness and surface figure and can be used to polish silicon materials. Although the feasibility of MRF for single-crystal silicon has been proved, there are still some problems such as low material removal rate and uncontrollable surface integrity. In this study, the MRF mechanism for single-crystal silicon was explored, and the preparation method of MR fluid was optimised. An experiment was performed to machine a large-aperture single-crystal silicon aspheric surface on an MRF machine developed by China Academy of Engineering Physics. After polishing for several times, the figure accuracy PV improved from 5.9 μm to 0.56 μm, and roughness Rq reduced to 1.2 nm, verifying the excellent performance of MRF in infrared material processing.
To achieve the super-smooth surface of the fused silica via using the magnetorheological finishing (MRF) technique, the synergistic effect of the rotational speed, viscosity, and working gap is well investigated. According to the pressure field simulation based on the two-dimensional Reynold equation, the working gap is of remarkable importance to the surface roughness among three parameters. Furthermore, such result is also revealed by the MRF experiment. Accordingly, the optimized process parameters are identified, and the final surface roughness is achieved as low as 0.22 nm.
Zinc sulfide is a kind of typical infrared optical material, commonly produced using single point diamond turning (SPDT). SPDT can efficiently produce zinc sulfide aspheric surfaces with micro-roughness and acceptable figure error. However the tool marks left by the diamond turning process cause high micro-roughness that degrades the optical performance when used in the visible region of the spectrum. Magnetorheological finishing (MRF) is a deterministic, sub-aperture polishing technology that is very helpful in improving both surface micro-roughness and surface figure.This paper mainly investigates the MRF technology of large aperture off-axis aspheric optical surfaces for zinc sulfide. The topological structure and coordinate transformation of a MRF machine tool PKC1200Q2 are analyzed and its kinematics is calculated, then the post-processing algorithm model of MRF for an optical lens is established. By taking the post-processing of off-axis aspheric surfacefor example, a post-processing algorithm that can be used for a raster tool path is deduced and the errors produced by the approximate treatment are analyzed. A polishing algorithm of trajectory planning and dwell time based on matrix equation and optimization theory is presented in this paper. Adopting this algorithm an experiment is performed to machining a large-aperture off-axis aspheric surface on the MRF machine developed by ourselves. After several times’ polishing, the figure accuracy PV is proved from 3.3λ to 2.0λ and RMS from 0.451λ to 0.327λ. This algorithm is used to polish the other shapes including spheres, aspheres and prisms.
The influences of immersion depth of magnetorheological finishing (MRF) on the shape and material removal rate (MRR) of removal function are theoretically investigated to establish the spot transition mechanism. Based on this mechanism, for the first time, the spot breeding method to predict the shape and removal rate of MRF spot is proposed. The UBK7 optical parts are polished to verify the proposed method on experimental installation PKC-1000Q2 developed by ourselves. The experimental results reveal that the predictions of shape and MRR with this method are precise. The proposed method provides a basis for analyzing the determinism of MRF due to geometry of the process.
A polymer coating was designed and prepared to modify the surface of CIP to match the hardness of KDP, and deliquescence removal was explored by addition proper water online. The above techniques not only weaken the mechanical scratches and increase removal rate, but also are beneficial for subsequently cleaning. Removal function exhibits particular transitional zone on the edge of finishing spot which clearly demonstrates the existence of different processing mechanisms simultaneously. The figure accuracy and PSD1 of a large-aperture KDP are apparently converged after MRF.
Magnetorheological finishing (MRF) is a key polishing technique capable of rapidly converging to the required surface figure. Due to the deficiency of general one-polishing-head MRF technology, a dual polishing heads MRF technology was studied and a dual polishing heads MRF machine with 8 axes was developed. The machine has the ability to manufacture large aperture optics with high figure accuracy. The large polishing head is suitable for polishing large aperture optics, controlling large spatial length’s wave structures, correcting low-medium frequency errors with high removal rates. While the small polishing head has more advantages in manufacturing small aperture optics, controlling small spatial wavelength’s wave structures, correcting mid-high frequency and removing nanoscale materials. Material removal characteristic and figure correction ability for each of large and small polishing head was studied. Each of two polishing heads respectively acquired stable and valid polishing removal function and ultra-precision flat sample. After a single polishing iteration using small polishing head, the figure error in 45mm diameter of a 50 mm diameter plano optics was significantly improved from 0.21λ to 0.08λ by PV (RMS 0.053λ to 0.015λ). After three polishing iterations using large polishing head , the figure error in 410mm×410mm of a 430mm×430mm large plano optics was significantly improved from 0.40λ to 0.10λ by PV (RMS 0.068λ to 0.013λ) .This results show that the dual polishing heads MRF machine not only have good material removal stability, but also excellent figure correction capability.
Magnetorheological finishing (MRF) is an advanced polishing technique capable of rapidly converging to the required
surface figure. This process can deterministically control the amount of the material removed by varying a time to dwell
at each particular position on the workpiece surface. The dwell time algorithm is one of the most important key
techniques of the MRF. A dwell time algorithm based on the1 matrix equation and optimization theory was presented in
this paper. The conventional mathematical model of the dwell time was transferred to a matrix equation containing initial
surface error, removal function and dwell time function. The dwell time to be calculated was just the solution to the
large, sparse matrix equation. A new mathematical model of the dwell time based on the optimization theory was
established, which aims to minimize the 2-norm or ∞-norm of the residual surface error. The solution meets almost all
the requirements of precise computer numerical control (CNC) without any need for extra data processing, because this
optimization model has taken some polishing condition as the constraints. Practical approaches to finding a minimal
least-squares solution and a minimal maximum solution are also discussed in this paper. Simulations have shown that the
proposed algorithm is numerically robust and reliable. With this algorithm an experiment has been performed on the
MRF machine developed by ourselves. After 4.7 minutes' polishing, the figure error of a flat workpiece with a 50 mm
diameter is improved by PV from 0.191λ(λ = 632.8 nm) to 0.087λ and RMS 0.041λ to 0.010λ. This algorithm can be constructed to polish workpieces of all shapes including flats, spheres, aspheres, and prisms, and it is capable of
improving the polishing figures dramatically.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.