Vanadium dioxide (VO2) is a polycrystalline thin film that reversibly changes from a semiconductor to a metallic state at 68°C, and has important applications in thermal detection and actuation as well as in reconfigurable photonic circuitry. In this work, we have produced VO2 thin films by oxygen ion-assisted electron-beam evaporation. Compared to prior work, the phase change temperature is as low as 54°C, which we believe arise due to the oxygen implantation from the ion-assisted process. The films were deposited on c-cut sapphire substrates, and their properties were measured using a four-point probe electrical sheet resistance measurement.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.