Mr. Sherif Hany Mousa Profile

Sherif Hany Mousa

at Siemens EDA

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Publications (2)

Proceedings Article | 23 March 2020 Paper

Model based CAOPC flow for memory chips to improve performance and consistency of RET solutions

Srividya Jayaram, Sherif Hany Mousa, Ashutosh Rathi, Pat LaCour, Zhenguo Zheng, Lei Zhang, Yaobin Feng, Jun Yao

Proceedings Volume 11327, 1132709 (2020) https://doi.org/10.1117/12.2551829

KEYWORDS: Optical proximity correction, SRAF, Resolution enhancement technologies, Lithography, Model-based design, Manufacturing, Pattern recognition

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Proceedings Article | 20 March 2018 Presentation + Paper

Model based cell-array OPC development for productivity improvement in memory device fabrication

Ahmed Seoud, Sherif Hany, Juhwan Kim, Jebum Yoon, Boram Jung, Sang-Jin Oh, Byoung-Sub Nam, Seyoung Oh, Chan-Ha Park

Proceedings Volume 10587, 105870K (2018) https://doi.org/10.1117/12.2297638

KEYWORDS: Optical proximity correction, Lithography, SRAF, Semiconducting wafers, Photomasks, Manufacturing, Computer simulations

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