The combination process of Magnetorheological finishing (MRF) and Computer controlled optical surfacing(CCOS) are adopted to overcome the drawback of traditional polishing method in final finishing of single-crystal silicon and the deterioration of the surface roughness of single-crystal silicon by Magnetorheological finishing. In order to meet the requirements of single-crystal silicon by magnetorheological finishing, a new magnetorheological finishing fluid is prepared and orthogonal process parameters experiments are designed to optimize the magnetorheological finishing parameters. Through the uniform finishing experiment of MRF and CCOS, the processing sequence conditions of the combined process are obtained. A single-crystal silicon mirror with diameter of 100 mm is finished with several iterations of MRF and CCOS, the surface roughness Ra reaches 0.7 nm which verified the prepared magnetorheological finishing fluid and the optimized parameters satisfied the Finishing requirements of the single-crystal silicon surface. The results prove that the combination of MRF and CCOS process has unique advantages in the final finishing of single-crystal silicon.
The influence of surface defects on high power laser optical elements will cause some harm to the performances of imaging system, including the energy consumption and the damage of film layer. To further increase surface defects on high power laser optical element, on-machine defects measuring system was investigated. Firstly, the selection and design are completed by the working condition analysis of the on-machine defects detection system. By designing on processing algorithms to realize the classification recognition and evaluation of surface defects. The calibration experiment of the scratch was done by using the self-made standard alignment plate. Finally, the detection and evaluation of surface defects of large diameter semi-cylindrical silicon mirror are realized. The calibration results show that the size deviation is less than 4% that meet the precision requirement of the detection of the defects. Through the detection of images the on-machine defects detection system can realize the accurate identification of surface defects.
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