CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12408 > Article
Presentation
18 April 2023 Deep-learning-based simulator for femtosecond laser micro-machining
Shuntaro Tani, Yohei Kobayashi
Author Affiliations +
Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC1240802 (2023) https://doi.org/10.1117/12.2648050
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
Femtosecond lasers are a powerful tool for micro-machining, while various parameters such as irradiation paths and pulse energies must be optimized. We have developed a method to simulate three-dimensional shapes after femtosecond pulse irradiation at arbitrary locations with arbitrary pulse energies using a difference equation for laser ablation based on deep learning. The deep-neural-network-based simulator successfully predicted the processing results for various materials such as semiconductors, glass, and polymers.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Shuntaro Tani and Yohei Kobayashi "Deep-learning-based simulator for femtosecond laser micro-machining", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC1240802 (18 April 2023); https://doi.org/10.1117/12.2648050
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Optical simulations
Femtosecond phenomena
Micromachining
Semiconductors
Glasses
Laser ablation
Laser processing
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top