In the quest of searching for the next disruptive mobile computing platform after smartphones, Augmented Reality (AR) glasses show exciting promise in allowing humans to seamlessly interface with the real and the virtual world in unprecedented ways. Metastructure based Surface Relief Gratings (SRG) is an emerging technology with powerful capabilities and flexibilities such as diffraction order control, polarization control, dispersion control, etc., potentially creating a truly immersive AR display that has high efficiency, contrast, resolution, is light weight and compact in form factor, all while coming at a lower cost. In this talk, the author will walk through the benefits metastructures can bring to AR display, and the unique challenges to nanofabrication pipeline for metastructure based waveguide, including layout generation, biasing, proximity correction, nanoimprint master and photolithography mask fabrication, and how various fabrication failures impact final device.
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