Deep-UV dielectric metasurfaces for biosensing and optical chirality

Ming Lun Tseng; Bo Ray Lee; Ting An Shu; Shang Jie Shen; Pei Ying Ho; Kuan-Heng Chen; Po Hsiang Hsu; Mao Feng Jiang; Jia Hua Lee; Yao-Wei Huang

doi:10.1117/12.3028015

4 October 2024 Deep-UV dielectric metasurfaces for biosensing and optical chirality

Ming Lun Tseng, Bo Ray Lee, Ting An Shu, Shang Jie Shen, Pei Ying Ho, Kuan-Heng Chen, Po Hsiang Hsu, Mao Feng Jiang, Jia Hua Lee, Yao-Wei Huang

Author Affiliations +

Proceedings Volume PC13115, UV and Higher Energy Photonics: From Materials to Applications 2024; PC131150B (2024) https://doi.org/10.1117/12.3028015
Event: Nanoscience + Engineering, 2024, San Diego, California, United States

Abstract

DUV light is of great importance in applications, including nanolithography, material science, and biology. Metasurfaces, comprising well-engineered nanoresonators, promise to improve DUV technologies due to their capability to manipulate light at the nanoscale. We present metasurfaces showing high-quality-factor resonance (high-Q) in the DUV range. We combined low-loss dielectric materials, resonance mode associated with the quasi-bound state in the continuum, and various device schemes to realize the DUV high-Q metasurfaces. We demonstrate metasurfaces with functionalities including imaging-based biosensing and high-Q optical charity. Fabrication and characterization of the high-Q metasurface will be reported. This work provides a platform to advance DUV nanophotonics in sensing, quantum optics, and nonlinear optics.

Conference Presentation

Citation Download Citation

Ming Lun Tseng, Bo Ray Lee, Ting An Shu, Shang Jie Shen, Pei Ying Ho, Kuan-Heng Chen, Po Hsiang Hsu, Mao Feng Jiang, Jia Hua Lee, and Yao-Wei Huang "Deep-UV dielectric metasurfaces for biosensing and optical chirality", Proc. SPIE PC13115, UV and Higher Energy Photonics: From Materials to Applications 2024, PC131150B (4 October 2024); https://doi.org/10.1117/12.3028015

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