A Novel Electro-Optical Technique In Metrology

A. H. Falkner

doi:10.1117/12.965517

25 July 1979 A Novel Electro-Optical Technique in Metrology

A. H. Falkner

Proceedings Volume 0164, 4th European Electro-Optics Conf; (1979) https://doi.org/10.1117/12.965517
Event: Fourth European Electro-Optics Conference, 1978, Utrecht, Netherlands

Abstract

A new electro-optical technique has been exploited in devices of high performance for the comparative metrology of certain features of small mechanical components. The technique and the devices are described and typical performance figures given.

Citation Download Citation

A. H. Falkner "A Novel Electro-Optical Technique in Metrology", Proc. SPIE 0164, 4th European Electro-Optics Conf, (25 July 1979); https://doi.org/10.1117/12.965517

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