Integrated Optical Circuits Fabricated With Laser-Written Masks

K. E. Wilson; C. T. Mueller; E. Garmire

doi:10.1117/12.933215

27 August 1982 Integrated Optical Circuits Fabricated With Laser-Written Masks

K. E. Wilson, C. T. Mueller, E. Garmire

Proceedings Volume 0321, Integrated Optics II; (1982) https://doi.org/10.1117/12.933215
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

Integrated optical circuits have been fabricated using laser-written masks. Straight and curved channel waveguides have been made by ion exchange from a KNO₃ melt of dimensions 10 to 30 pm in width and typically 4 to 5 cm in length. A mask made by a multiple exposure technique from a laser-written curved channel mask has been used to delineate a directional coupler in LiNbO₃.

Citation Download Citation

K. E. Wilson, C. T. Mueller, and E. Garmire "Integrated Optical Circuits Fabricated With Laser-Written Masks", Proc. SPIE 0321, Integrated Optics II, (27 August 1982); https://doi.org/10.1117/12.933215

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