Pencil Beam Interferometer For Aspherical Optical Surfaces

K. von Bieren

doi:10.1117/12.933743

19 November 1982 Pencil Beam Interferometer For Aspherical Optical Surfaces

K. von Bieren

Proceedings Volume 0343, Laser Diagnostics; (1982) https://doi.org/10.1117/12.933743
Event: 1982 Technical Symposium East, 1982, Arlington, United States

Abstract

An interferometer which provides for the precise figure measurement of optical surfaces through the interference of two pencil beams, reflected off the optical surface. Since reference surfaces are not required, the interferometer is also capable of analysing aspheric optical surfaces like axicons. The accuracy of the figure measurement is ± 2 nm.

Citation Download Citation

K. von Bieren "Pencil Beam Interferometer For Aspherical Optical Surfaces", Proc. SPIE 0343, Laser Diagnostics, (19 November 1982); https://doi.org/10.1117/12.933743

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