Characterization Of Laser Blown Molydisilicide Links

Scott Wills; Joe McPherson

doi:10.1117/12.934958

9 August 1983 Characterization Of Laser Blown Molydisilicide Links

Scott Wills, Joe McPherson

Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934958
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

The laser blowing of MoSi₂/Poly-n + fuse links is reported. The polycide links were successfully blown under 10K Å of PSG (phospho silicate glass used for isolation between the link and the aluminum) at laser power levels comparable to those used for standard poly link vaporization. Also, the size of the crater in the PSG, produced by the expanding gases associated with link vaporization, was found to be less than that for standard poly links. Laser power levels were found which gave both a near unity blowing probability and produced no substrate damage when the link was located on top of 7-10K Å of field oxide. The successful blowing of silicide links is very important with respect to the use of both laser redundancy and silicides in VLSI technology.

Citation Download Citation

Scott Wills and Joe McPherson "Characterization Of Laser Blown Molydisilicide Links", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934958

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