Laser Microsurgery And Fabrication Of Integrated Circuits

J. R. Moulic; Y. C. Kiang; R. W. Lang; J. C. Logue

doi:10.1117/12.934959

9 August 1983 Laser Microsurgery And Fabrication Of Integrated Circuits

J. R. Moulic, Y. C. Kiang, R. W. Lang, J. C. Logue

Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934959
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

The complexity of integrated circuits has progressed from a single logic function on a chip consisting of a few dozen transistors to a complete, single chip 32-bit microprocessor of 100,000 transistors. This growth has created a challenge for the product designer--to utilize the increased functional capacity available with VLSI, while still developing designs rapidly and at a reasonable cost.

Citation Download Citation

J. R. Moulic, Y. C. Kiang, R. W. Lang, and J. C. Logue "Laser Microsurgery And Fabrication Of Integrated Circuits", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934959

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