Microlithography Techniques Using A Microwave Powered Deep UV Source

John C. Matthews; Michael G. Ury; Anthony D. Birch; Mitchell A. Lashman

doi:10.1117/12.935136

7 November 1983 Microlithography Techniques Using A Microwave Powered Deep UV Source

John C. Matthews, Michael G. Ury, Anthony D. Birch, Mitchell A. Lashman

Proceedings Volume 0394, Optical Microlithography II: Technology for the 1980s; (1983) https://doi.org/10.1117/12.935136
Event: 1983 Microlithography Conferences, 1983, Santa Clara, United States

Abstract

A number of multilevel resist processes are being developed to solve the difficult problem of producing submicrometer circuit features over profiled surfaces. The application of a novel illumination system, comprising a microwave powered source and catadioptic optical system, to accomplish the pattern transfer step through planarization resists by deep UV flood exposure is characterized. The microwave powered lamp generates 114 watts of deep UV (200 - 260 nm) with an efficiency of greater than 9%. Data showing an effec-tive bulb lifetime of 500 hours or more is presented. Optical filtering techniques are described which effectively attenuate energy above 245 nm and result in excellent critical dimension control. Enhancing areas of the deep UV spectrum by using microwave powered bulbs with additive materials such as cadmium is discussed, and spectral data presented. Problem areas for successful use of the PCM process in production are defined and solutions are discussed. Finally, extensions of microwave powered deep UV lamp technology to other areas of microlithography are discussed.

Citation Download Citation

John C. Matthews, Michael G. Ury, Anthony D. Birch, and Mitchell A. Lashman "Microlithography Techniques Using A Microwave Powered Deep UV Source", Proc. SPIE 0394, Optical Microlithography II: Technology for the 1980s, (7 November 1983); https://doi.org/10.1117/12.935136

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available