Optical And Thermal Effects In Laser Chemical Vapor Deposition

S D Allen; R Y. Jan; R. H Edwards; S M Mazuk; S D Vernon

doi:10.1117/12.939433

14 June 1984 Optical And Thermal Effects In Laser Chemical Vapor Deposition

S D Allen, R Y. Jan, R. H Edwards, S M Mazuk, S D Vernon

Proceedings Volume 0459, Laser-Assisted Deposition, Etching, and Doping; (1984) https://doi.org/10.1117/12.939433
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

In laser chemical vapor deposition (LCVD), a laser is used to drive a deposition reaction by locally heating the substrate. Although the reactant systems used may be similar to conventional CVD, the film growth characteristics may differ in several ways. The changes in the optical properties of the film/substrate during deposition must be considered as the amount of laser energy absorbed determines the surface temperature and therefore the deposition rate. Also affecting the deposition rate is the diffusion of reactants to the reaction zone. Because of the small area heated in LCVD, higher surface temperatures can be accessed before diffusion and convection limit the deposition rate. For favorable reactant systems, very rapid deposition rates (greater than 100 um/sec) and scan speeds for line deposition (greater than 10 cm/sec) can be achieved.

Citation Download Citation

S D Allen, R Y. Jan, R. H Edwards, S M Mazuk, and S D Vernon "Optical And Thermal Effects In Laser Chemical Vapor Deposition", Proc. SPIE 0459, Laser-Assisted Deposition, Etching, and Doping, (14 June 1984); https://doi.org/10.1117/12.939433

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available