Development Of High Resolution Zone Plate By Holography And Ion-Etching Techniques

Yong-Gang Su; Shao-Jun Fu; Xiao-Min Tao; Yi-Lin Hong; Yun-Wu Zhang

doi:10.1117/12.939105

15 January 1988 Development Of High Resolution Zone Plate By Holography And Ion-Etching Techniques

Yong-Gang Su, Shao-Jun Fu, Xiao-Min Tao, Yi-Lin Hong, Yun-Wu Zhang

Proceedings Volume 0673, Holography Applications; (1988) https://doi.org/10.1117/12.939105
Event: Holography Applications, 1986, Beijing, China

Abstract

The purpose of development and the processing steps to fabricate high resolution zone plates, especially holographic exposure and ion-etching, are described. Also the experimental results and some prospects are presented.

Citation Download Citation

Yong-Gang Su, Shao-Jun Fu, Xiao-Min Tao, Yi-Lin Hong, and Yun-Wu Zhang "Development Of High Resolution Zone Plate By Holography And Ion-Etching Techniques", Proc. SPIE 0673, Holography Applications, (15 January 1988); https://doi.org/10.1117/12.939105

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available